12/10/2010	11:19:36 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	11:19:48 AM	Recipe started at 11:19 AM
12/10/2010	11:19:48 AM	Helium valve closed
12/10/2010	11:19:48 AM	H2 valve closed
12/10/2010	11:19:48 AM	BCl3 valve closed
12/10/2010	11:19:48 AM	PH3 valve closed
12/10/2010	11:19:48 AM	SiCl4 pre valve closed
12/10/2010	11:19:48 AM	SiCl4 post valve closed
12/10/2010	11:19:48 AM	Main Vac valve closed
12/10/2010	11:19:48 AM	Bubbler valve closed
12/10/2010	11:19:48 AM	Bypass valve opened
12/10/2010	11:19:48 AM	Helium MFC set to  0.000000
12/10/2010	11:19:48 AM	H2 MFC set to  0.000000
12/10/2010	11:19:48 AM	BCl3 MFC set to  0.000000
12/10/2010	11:19:48 AM	PHl3 MFC set to  0.000000
12/10/2010	11:19:48 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:19:48 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:19:48 AM	Tube furnace set to 0
12/10/2010	11:19:48 AM	Helium valve closed
12/10/2010	11:19:48 AM	H2 valve closed
12/10/2010	11:19:48 AM	BCl3 valve closed
12/10/2010	11:19:48 AM	PH3 valve closed
12/10/2010	11:19:48 AM	SiCl4 pre valve closed
12/10/2010	11:19:48 AM	SiCl4 post valve closed
12/10/2010	11:19:48 AM	Bubbler valve closed
12/10/2010	11:19:48 AM	Main Vac valve opened
12/10/2010	11:19:48 AM	Bypass valve opened
12/10/2010	11:19:48 AM	Helium MFC set to  0.000000
12/10/2010	11:19:48 AM	H2 MFC set to  0.000000
12/10/2010	11:19:48 AM	BCl3 MFC set to  0.000000
12/10/2010	11:19:48 AM	PHl3 MFC set to  0.000000
12/10/2010	11:19:48 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:19:48 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:19:49 AM	Tube furnace set to 0
12/10/2010	11:20:49 AM	H2 valve closed
12/10/2010	11:20:49 AM	BCl3 valve closed
12/10/2010	11:20:49 AM	PH3 valve closed
12/10/2010	11:20:49 AM	SiCl4 pre valve closed
12/10/2010	11:20:49 AM	SiCl4 post valve closed
12/10/2010	11:20:49 AM	Bubbler valve closed
12/10/2010	11:20:49 AM	Helium valve opened
12/10/2010	11:20:49 AM	Main Vac valve opened
12/10/2010	11:20:49 AM	Bypass valve opened
12/10/2010	11:20:49 AM	Helium MFC set to  100.000000
12/10/2010	11:20:49 AM	H2 MFC set to  0.000000
12/10/2010	11:20:49 AM	BCl3 MFC set to  0.000000
12/10/2010	11:20:49 AM	PHl3 MFC set to  0.000000
12/10/2010	11:20:49 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:20:49 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:20:49 AM	Tube furnace set to 0
12/10/2010	11:21:49 AM	Helium valve closed
12/10/2010	11:21:49 AM	H2 valve closed
12/10/2010	11:21:49 AM	BCl3 valve closed
12/10/2010	11:21:49 AM	PH3 valve closed
12/10/2010	11:21:49 AM	SiCl4 pre valve closed
12/10/2010	11:21:49 AM	SiCl4 post valve closed
12/10/2010	11:21:49 AM	Bubbler valve closed
12/10/2010	11:21:49 AM	Main Vac valve opened
12/10/2010	11:21:49 AM	Bypass valve opened
12/10/2010	11:21:49 AM	Helium MFC set to  0.000000
12/10/2010	11:21:49 AM	H2 MFC set to  0.000000
12/10/2010	11:21:49 AM	BCl3 MFC set to  0.000000
12/10/2010	11:21:49 AM	PHl3 MFC set to  0.000000
12/10/2010	11:21:49 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:21:49 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:21:49 AM	Tube furnace set to 0
12/10/2010	11:22:49 AM	H2 valve closed
12/10/2010	11:22:49 AM	BCl3 valve closed
12/10/2010	11:22:49 AM	PH3 valve closed
12/10/2010	11:22:49 AM	SiCl4 pre valve closed
12/10/2010	11:22:49 AM	SiCl4 post valve closed
12/10/2010	11:22:49 AM	Bubbler valve closed
12/10/2010	11:22:49 AM	Helium valve opened
12/10/2010	11:22:49 AM	Main Vac valve opened
12/10/2010	11:22:49 AM	Bypass valve opened
12/10/2010	11:22:49 AM	Helium MFC set to  100.000000
12/10/2010	11:22:49 AM	H2 MFC set to  0.000000
12/10/2010	11:22:49 AM	BCl3 MFC set to  0.000000
12/10/2010	11:22:49 AM	PHl3 MFC set to  0.000000
12/10/2010	11:22:49 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:22:49 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:22:49 AM	Tube furnace set to 0
12/10/2010	11:23:49 AM	Helium valve closed
12/10/2010	11:23:49 AM	H2 valve closed
12/10/2010	11:23:49 AM	BCl3 valve closed
12/10/2010	11:23:49 AM	PH3 valve closed
12/10/2010	11:23:49 AM	SiCl4 pre valve closed
12/10/2010	11:23:49 AM	SiCl4 post valve closed
12/10/2010	11:23:49 AM	Bubbler valve closed
12/10/2010	11:23:49 AM	Main Vac valve opened
12/10/2010	11:23:49 AM	Bypass valve opened
12/10/2010	11:23:49 AM	Helium MFC set to  0.000000
12/10/2010	11:23:49 AM	H2 MFC set to  0.000000
12/10/2010	11:23:49 AM	BCl3 MFC set to  0.000000
12/10/2010	11:23:49 AM	PHl3 MFC set to  0.000000
12/10/2010	11:23:49 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:23:49 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:23:49 AM	Tube furnace set to 0
12/10/2010	11:24:49 AM	H2 valve closed
12/10/2010	11:24:49 AM	BCl3 valve closed
12/10/2010	11:24:49 AM	PH3 valve closed
12/10/2010	11:24:49 AM	SiCl4 pre valve closed
12/10/2010	11:24:49 AM	SiCl4 post valve closed
12/10/2010	11:24:49 AM	Bubbler valve closed
12/10/2010	11:24:49 AM	Helium valve opened
12/10/2010	11:24:49 AM	Main Vac valve opened
12/10/2010	11:24:49 AM	Bypass valve opened
12/10/2010	11:24:49 AM	Helium MFC set to  100.000000
12/10/2010	11:24:49 AM	H2 MFC set to  0.000000
12/10/2010	11:24:49 AM	BCl3 MFC set to  0.000000
12/10/2010	11:24:49 AM	PHl3 MFC set to  0.000000
12/10/2010	11:24:49 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:24:49 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:24:50 AM	Tube furnace set to 0
12/10/2010	11:25:50 AM	Helium valve closed
12/10/2010	11:25:50 AM	H2 valve closed
12/10/2010	11:25:50 AM	BCl3 valve closed
12/10/2010	11:25:50 AM	PH3 valve closed
12/10/2010	11:25:50 AM	SiCl4 pre valve closed
12/10/2010	11:25:50 AM	SiCl4 post valve closed
12/10/2010	11:25:50 AM	Bubbler valve closed
12/10/2010	11:25:50 AM	Main Vac valve opened
12/10/2010	11:25:50 AM	Bypass valve opened
12/10/2010	11:25:50 AM	Helium MFC set to  0.000000
12/10/2010	11:25:50 AM	H2 MFC set to  0.000000
12/10/2010	11:25:50 AM	BCl3 MFC set to  0.000000
12/10/2010	11:25:50 AM	PHl3 MFC set to  0.000000
12/10/2010	11:25:50 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:25:50 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:25:50 AM	Tube furnace set to 0
12/10/2010	11:26:50 AM	H2 valve closed
12/10/2010	11:26:50 AM	BCl3 valve closed
12/10/2010	11:26:50 AM	PH3 valve closed
12/10/2010	11:26:50 AM	SiCl4 pre valve closed
12/10/2010	11:26:50 AM	SiCl4 post valve closed
12/10/2010	11:26:50 AM	Bubbler valve closed
12/10/2010	11:26:50 AM	Helium valve opened
12/10/2010	11:26:50 AM	Main Vac valve opened
12/10/2010	11:26:50 AM	Bypass valve opened
12/10/2010	11:26:50 AM	Helium MFC set to  100.000000
12/10/2010	11:26:50 AM	H2 MFC set to  0.000000
12/10/2010	11:26:50 AM	BCl3 MFC set to  0.000000
12/10/2010	11:26:50 AM	PHl3 MFC set to  0.000000
12/10/2010	11:26:50 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:26:50 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:26:50 AM	Tube furnace set to 0
12/10/2010	11:27:50 AM	Helium valve closed
12/10/2010	11:27:50 AM	H2 valve closed
12/10/2010	11:27:50 AM	BCl3 valve closed
12/10/2010	11:27:50 AM	PH3 valve closed
12/10/2010	11:27:50 AM	SiCl4 pre valve closed
12/10/2010	11:27:50 AM	SiCl4 post valve closed
12/10/2010	11:27:50 AM	Bubbler valve closed
12/10/2010	11:27:50 AM	Main Vac valve opened
12/10/2010	11:27:50 AM	Bypass valve opened
12/10/2010	11:27:50 AM	Helium MFC set to  0.000000
12/10/2010	11:27:50 AM	H2 MFC set to  0.000000
12/10/2010	11:27:50 AM	BCl3 MFC set to  0.000000
12/10/2010	11:27:50 AM	PHl3 MFC set to  0.000000
12/10/2010	11:27:50 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:27:50 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:27:50 AM	Tube furnace set to 0
12/10/2010	11:28:50 AM	H2 valve closed
12/10/2010	11:28:50 AM	BCl3 valve closed
12/10/2010	11:28:50 AM	PH3 valve closed
12/10/2010	11:28:50 AM	SiCl4 pre valve closed
12/10/2010	11:28:50 AM	SiCl4 post valve closed
12/10/2010	11:28:50 AM	Bubbler valve closed
12/10/2010	11:28:50 AM	Helium valve opened
12/10/2010	11:28:50 AM	Main Vac valve opened
12/10/2010	11:28:50 AM	Bypass valve opened
12/10/2010	11:28:50 AM	Helium MFC set to  100.000000
12/10/2010	11:28:50 AM	H2 MFC set to  0.000000
12/10/2010	11:28:50 AM	BCl3 MFC set to  0.000000
12/10/2010	11:28:50 AM	PHl3 MFC set to  0.000000
12/10/2010	11:28:50 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:28:50 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:28:50 AM	Tube furnace set to 0
12/10/2010	11:29:50 AM	Helium valve closed
12/10/2010	11:29:50 AM	H2 valve closed
12/10/2010	11:29:50 AM	BCl3 valve closed
12/10/2010	11:29:50 AM	PH3 valve closed
12/10/2010	11:29:50 AM	SiCl4 pre valve closed
12/10/2010	11:29:50 AM	SiCl4 post valve closed
12/10/2010	11:29:50 AM	Bubbler valve closed
12/10/2010	11:29:50 AM	Main Vac valve opened
12/10/2010	11:29:50 AM	Bypass valve opened
12/10/2010	11:29:50 AM	Helium MFC set to  0.000000
12/10/2010	11:29:50 AM	H2 MFC set to  0.000000
12/10/2010	11:29:50 AM	BCl3 MFC set to  0.000000
12/10/2010	11:29:50 AM	PHl3 MFC set to  0.000000
12/10/2010	11:29:50 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:29:50 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:29:51 AM	Tube furnace set to 0
12/10/2010	11:30:51 AM	H2 valve closed
12/10/2010	11:30:51 AM	BCl3 valve closed
12/10/2010	11:30:51 AM	PH3 valve closed
12/10/2010	11:30:51 AM	SiCl4 pre valve closed
12/10/2010	11:30:51 AM	SiCl4 post valve closed
12/10/2010	11:30:51 AM	Bubbler valve closed
12/10/2010	11:30:51 AM	Helium valve opened
12/10/2010	11:30:51 AM	Main Vac valve opened
12/10/2010	11:30:51 AM	Bypass valve opened
12/10/2010	11:30:51 AM	Helium MFC set to  100.000000
12/10/2010	11:30:51 AM	H2 MFC set to  0.000000
12/10/2010	11:30:51 AM	BCl3 MFC set to  0.000000
12/10/2010	11:30:51 AM	PHl3 MFC set to  0.000000
12/10/2010	11:30:51 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:30:51 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:30:51 AM	Tube furnace set to 0
12/10/2010	11:31:51 AM	Helium valve closed
12/10/2010	11:31:51 AM	H2 valve closed
12/10/2010	11:31:51 AM	BCl3 valve closed
12/10/2010	11:31:51 AM	PH3 valve closed
12/10/2010	11:31:51 AM	SiCl4 pre valve closed
12/10/2010	11:31:51 AM	SiCl4 post valve closed
12/10/2010	11:31:51 AM	Bubbler valve closed
12/10/2010	11:31:51 AM	Main Vac valve opened
12/10/2010	11:31:51 AM	Bypass valve opened
12/10/2010	11:31:51 AM	Helium MFC set to  0.000000
12/10/2010	11:31:51 AM	H2 MFC set to  0.000000
12/10/2010	11:31:51 AM	BCl3 MFC set to  0.000000
12/10/2010	11:31:51 AM	PHl3 MFC set to  0.000000
12/10/2010	11:31:51 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:31:51 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:31:51 AM	Tube furnace set to 0
12/10/2010	11:32:51 AM	H2 valve closed
12/10/2010	11:32:51 AM	BCl3 valve closed
12/10/2010	11:32:51 AM	PH3 valve closed
12/10/2010	11:32:51 AM	SiCl4 pre valve closed
12/10/2010	11:32:51 AM	SiCl4 post valve closed
12/10/2010	11:32:51 AM	Bubbler valve closed
12/10/2010	11:32:51 AM	Helium valve opened
12/10/2010	11:32:51 AM	Main Vac valve opened
12/10/2010	11:32:51 AM	Bypass valve opened
12/10/2010	11:32:51 AM	Helium MFC set to  100.000000
12/10/2010	11:32:51 AM	H2 MFC set to  0.000000
12/10/2010	11:32:51 AM	BCl3 MFC set to  0.000000
12/10/2010	11:32:51 AM	PHl3 MFC set to  0.000000
12/10/2010	11:32:51 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:32:51 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:32:51 AM	Tube furnace set to 0
12/10/2010	11:33:51 AM	Helium valve closed
12/10/2010	11:33:51 AM	H2 valve closed
12/10/2010	11:33:51 AM	BCl3 valve closed
12/10/2010	11:33:51 AM	PH3 valve closed
12/10/2010	11:33:51 AM	SiCl4 pre valve closed
12/10/2010	11:33:51 AM	SiCl4 post valve closed
12/10/2010	11:33:51 AM	Bubbler valve closed
12/10/2010	11:33:51 AM	Main Vac valve opened
12/10/2010	11:33:51 AM	Bypass valve opened
12/10/2010	11:33:51 AM	Helium MFC set to  0.000000
12/10/2010	11:33:51 AM	H2 MFC set to  0.000000
12/10/2010	11:33:51 AM	BCl3 MFC set to  0.000000
12/10/2010	11:33:51 AM	PHl3 MFC set to  0.000000
12/10/2010	11:33:51 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:33:51 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:33:51 AM	Tube furnace set to 0
12/10/2010	11:34:51 AM	H2 valve closed
12/10/2010	11:34:51 AM	BCl3 valve closed
12/10/2010	11:34:51 AM	PH3 valve closed
12/10/2010	11:34:51 AM	SiCl4 pre valve closed
12/10/2010	11:34:51 AM	SiCl4 post valve closed
12/10/2010	11:34:51 AM	Bubbler valve closed
12/10/2010	11:34:51 AM	Helium valve opened
12/10/2010	11:34:51 AM	Main Vac valve opened
12/10/2010	11:34:51 AM	Bypass valve opened
12/10/2010	11:34:51 AM	Helium MFC set to  100.000000
12/10/2010	11:34:51 AM	H2 MFC set to  0.000000
12/10/2010	11:34:51 AM	BCl3 MFC set to  0.000000
12/10/2010	11:34:51 AM	PHl3 MFC set to  0.000000
12/10/2010	11:34:51 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:34:51 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:34:52 AM	Tube furnace set to 0
12/10/2010	11:35:52 AM	Helium valve closed
12/10/2010	11:35:52 AM	H2 valve closed
12/10/2010	11:35:52 AM	BCl3 valve closed
12/10/2010	11:35:52 AM	PH3 valve closed
12/10/2010	11:35:52 AM	SiCl4 pre valve closed
12/10/2010	11:35:52 AM	SiCl4 post valve closed
12/10/2010	11:35:52 AM	Bubbler valve closed
12/10/2010	11:35:52 AM	Main Vac valve opened
12/10/2010	11:35:52 AM	Bypass valve opened
12/10/2010	11:35:52 AM	Helium MFC set to  0.000000
12/10/2010	11:35:52 AM	H2 MFC set to  0.000000
12/10/2010	11:35:52 AM	BCl3 MFC set to  0.000000
12/10/2010	11:35:52 AM	PHl3 MFC set to  0.000000
12/10/2010	11:35:52 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:35:52 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:35:52 AM	Tube furnace set to 0
12/10/2010	11:36:52 AM	H2 valve closed
12/10/2010	11:36:52 AM	BCl3 valve closed
12/10/2010	11:36:52 AM	PH3 valve closed
12/10/2010	11:36:52 AM	SiCl4 pre valve closed
12/10/2010	11:36:52 AM	SiCl4 post valve closed
12/10/2010	11:36:52 AM	Bubbler valve closed
12/10/2010	11:36:52 AM	Helium valve opened
12/10/2010	11:36:52 AM	Main Vac valve opened
12/10/2010	11:36:52 AM	Bypass valve opened
12/10/2010	11:36:52 AM	Helium MFC set to  100.000000
12/10/2010	11:36:52 AM	H2 MFC set to  0.000000
12/10/2010	11:36:52 AM	BCl3 MFC set to  0.000000
12/10/2010	11:36:52 AM	PHl3 MFC set to  0.000000
12/10/2010	11:36:52 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:36:52 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:36:52 AM	Tube furnace set to 0
12/10/2010	11:37:52 AM	Helium valve closed
12/10/2010	11:37:52 AM	H2 valve closed
12/10/2010	11:37:52 AM	BCl3 valve closed
12/10/2010	11:37:52 AM	PH3 valve closed
12/10/2010	11:37:52 AM	SiCl4 pre valve closed
12/10/2010	11:37:52 AM	SiCl4 post valve closed
12/10/2010	11:37:52 AM	Bubbler valve closed
12/10/2010	11:37:52 AM	Main Vac valve opened
12/10/2010	11:37:52 AM	Bypass valve opened
12/10/2010	11:37:52 AM	Helium MFC set to  0.000000
12/10/2010	11:37:52 AM	H2 MFC set to  0.000000
12/10/2010	11:37:52 AM	BCl3 MFC set to  0.000000
12/10/2010	11:37:52 AM	PHl3 MFC set to  0.000000
12/10/2010	11:37:52 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:37:52 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:37:52 AM	Tube furnace set to 0
12/10/2010	11:38:52 AM	H2 valve closed
12/10/2010	11:38:52 AM	BCl3 valve closed
12/10/2010	11:38:52 AM	PH3 valve closed
12/10/2010	11:38:52 AM	SiCl4 pre valve closed
12/10/2010	11:38:52 AM	SiCl4 post valve closed
12/10/2010	11:38:52 AM	Bubbler valve closed
12/10/2010	11:38:52 AM	Helium valve opened
12/10/2010	11:38:52 AM	Main Vac valve opened
12/10/2010	11:38:52 AM	Bypass valve opened
12/10/2010	11:38:52 AM	Helium MFC set to  100.000000
12/10/2010	11:38:52 AM	H2 MFC set to  0.000000
12/10/2010	11:38:52 AM	BCl3 MFC set to  0.000000
12/10/2010	11:38:52 AM	PHl3 MFC set to  0.000000
12/10/2010	11:38:52 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:38:52 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:38:52 AM	Tube furnace set to 0
12/10/2010	11:39:52 AM	Helium valve closed
12/10/2010	11:39:52 AM	H2 valve closed
12/10/2010	11:39:52 AM	BCl3 valve closed
12/10/2010	11:39:52 AM	PH3 valve closed
12/10/2010	11:39:52 AM	SiCl4 pre valve closed
12/10/2010	11:39:52 AM	SiCl4 post valve closed
12/10/2010	11:39:52 AM	Bubbler valve closed
12/10/2010	11:39:52 AM	Main Vac valve opened
12/10/2010	11:39:52 AM	Bypass valve opened
12/10/2010	11:39:52 AM	Helium MFC set to  0.000000
12/10/2010	11:39:52 AM	H2 MFC set to  0.000000
12/10/2010	11:39:52 AM	BCl3 MFC set to  0.000000
12/10/2010	11:39:52 AM	PHl3 MFC set to  0.000000
12/10/2010	11:39:52 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:39:52 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:39:53 AM	Tube furnace set to 0
12/10/2010	11:39:54 AM	Run finished at 11:39 AM
12/10/2010	11:39:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	11:47:23 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	11:47:35 AM	Recipe started at 11:47 AM
12/10/2010	11:47:35 AM	Helium valve closed
12/10/2010	11:47:35 AM	H2 valve closed
12/10/2010	11:47:35 AM	BCl3 valve closed
12/10/2010	11:47:35 AM	PH3 valve closed
12/10/2010	11:47:35 AM	SiCl4 pre valve closed
12/10/2010	11:47:35 AM	SiCl4 post valve closed
12/10/2010	11:47:35 AM	Main Vac valve closed
12/10/2010	11:47:35 AM	Bubbler valve closed
12/10/2010	11:47:35 AM	Bypass valve opened
12/10/2010	11:47:35 AM	Helium MFC set to  0.000000
12/10/2010	11:47:35 AM	H2 MFC set to  0.000000
12/10/2010	11:47:35 AM	BCl3 MFC set to  0.000000
12/10/2010	11:47:35 AM	PHl3 MFC set to  0.000000
12/10/2010	11:47:35 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:47:35 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:47:35 AM	Tube furnace set to 0
12/10/2010	11:47:35 AM	Helium valve closed
12/10/2010	11:47:35 AM	H2 valve closed
12/10/2010	11:47:35 AM	BCl3 valve closed
12/10/2010	11:47:35 AM	PH3 valve closed
12/10/2010	11:47:35 AM	SiCl4 pre valve closed
12/10/2010	11:47:35 AM	SiCl4 post valve closed
12/10/2010	11:47:35 AM	Bubbler valve closed
12/10/2010	11:47:35 AM	Main Vac valve opened
12/10/2010	11:47:35 AM	Bypass valve opened
12/10/2010	11:47:35 AM	Helium MFC set to  0.000000
12/10/2010	11:47:35 AM	H2 MFC set to  0.000000
12/10/2010	11:47:35 AM	BCl3 MFC set to  0.000000
12/10/2010	11:47:35 AM	PHl3 MFC set to  0.000000
12/10/2010	11:47:35 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:47:35 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:47:35 AM	Tube furnace set to 0
12/10/2010	11:48:35 AM	H2 valve closed
12/10/2010	11:48:35 AM	BCl3 valve closed
12/10/2010	11:48:35 AM	PH3 valve closed
12/10/2010	11:48:35 AM	SiCl4 pre valve closed
12/10/2010	11:48:35 AM	SiCl4 post valve closed
12/10/2010	11:48:35 AM	Bubbler valve closed
12/10/2010	11:48:35 AM	Helium valve opened
12/10/2010	11:48:35 AM	Main Vac valve opened
12/10/2010	11:48:35 AM	Bypass valve opened
12/10/2010	11:48:35 AM	Helium MFC set to  100.000000
12/10/2010	11:48:35 AM	H2 MFC set to  0.000000
12/10/2010	11:48:36 AM	BCl3 MFC set to  0.000000
12/10/2010	11:48:36 AM	PHl3 MFC set to  0.000000
12/10/2010	11:48:36 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:48:36 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:48:36 AM	Tube furnace set to 0
12/10/2010	11:49:36 AM	Helium valve closed
12/10/2010	11:49:36 AM	H2 valve closed
12/10/2010	11:49:36 AM	BCl3 valve closed
12/10/2010	11:49:36 AM	PH3 valve closed
12/10/2010	11:49:36 AM	SiCl4 pre valve closed
12/10/2010	11:49:36 AM	SiCl4 post valve closed
12/10/2010	11:49:36 AM	Bubbler valve closed
12/10/2010	11:49:36 AM	Main Vac valve opened
12/10/2010	11:49:36 AM	Bypass valve opened
12/10/2010	11:49:36 AM	Helium MFC set to  0.000000
12/10/2010	11:49:36 AM	H2 MFC set to  0.000000
12/10/2010	11:49:36 AM	BCl3 MFC set to  0.000000
12/10/2010	11:49:36 AM	PHl3 MFC set to  0.000000
12/10/2010	11:49:36 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:49:36 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:49:36 AM	Tube furnace set to 0
12/10/2010	11:50:36 AM	H2 valve closed
12/10/2010	11:50:36 AM	BCl3 valve closed
12/10/2010	11:50:36 AM	PH3 valve closed
12/10/2010	11:50:36 AM	SiCl4 pre valve closed
12/10/2010	11:50:36 AM	SiCl4 post valve closed
12/10/2010	11:50:36 AM	Bubbler valve closed
12/10/2010	11:50:36 AM	Helium valve opened
12/10/2010	11:50:36 AM	Main Vac valve opened
12/10/2010	11:50:36 AM	Bypass valve opened
12/10/2010	11:50:36 AM	Helium MFC set to  100.000000
12/10/2010	11:50:36 AM	H2 MFC set to  0.000000
12/10/2010	11:50:36 AM	BCl3 MFC set to  0.000000
12/10/2010	11:50:36 AM	PHl3 MFC set to  0.000000
12/10/2010	11:50:36 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:50:36 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:50:36 AM	Tube furnace set to 0
12/10/2010	11:51:36 AM	Helium valve closed
12/10/2010	11:51:36 AM	H2 valve closed
12/10/2010	11:51:36 AM	BCl3 valve closed
12/10/2010	11:51:36 AM	PH3 valve closed
12/10/2010	11:51:36 AM	SiCl4 pre valve closed
12/10/2010	11:51:36 AM	SiCl4 post valve closed
12/10/2010	11:51:36 AM	Bubbler valve closed
12/10/2010	11:51:36 AM	Main Vac valve opened
12/10/2010	11:51:36 AM	Bypass valve opened
12/10/2010	11:51:36 AM	Helium MFC set to  0.000000
12/10/2010	11:51:36 AM	H2 MFC set to  0.000000
12/10/2010	11:51:36 AM	BCl3 MFC set to  0.000000
12/10/2010	11:51:36 AM	PHl3 MFC set to  0.000000
12/10/2010	11:51:36 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:51:36 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:51:36 AM	Tube furnace set to 0
12/10/2010	11:52:36 AM	H2 valve closed
12/10/2010	11:52:36 AM	BCl3 valve closed
12/10/2010	11:52:36 AM	PH3 valve closed
12/10/2010	11:52:36 AM	SiCl4 pre valve closed
12/10/2010	11:52:36 AM	SiCl4 post valve closed
12/10/2010	11:52:36 AM	Bubbler valve closed
12/10/2010	11:52:36 AM	Helium valve opened
12/10/2010	11:52:36 AM	Main Vac valve opened
12/10/2010	11:52:36 AM	Bypass valve opened
12/10/2010	11:52:36 AM	Helium MFC set to  100.000000
12/10/2010	11:52:36 AM	H2 MFC set to  0.000000
12/10/2010	11:52:36 AM	BCl3 MFC set to  0.000000
12/10/2010	11:52:36 AM	PHl3 MFC set to  0.000000
12/10/2010	11:52:36 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:52:36 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:52:36 AM	Tube furnace set to 0
12/10/2010	11:53:36 AM	Helium valve closed
12/10/2010	11:53:36 AM	H2 valve closed
12/10/2010	11:53:36 AM	BCl3 valve closed
12/10/2010	11:53:36 AM	PH3 valve closed
12/10/2010	11:53:36 AM	SiCl4 pre valve closed
12/10/2010	11:53:36 AM	SiCl4 post valve closed
12/10/2010	11:53:36 AM	Bubbler valve closed
12/10/2010	11:53:36 AM	Main Vac valve opened
12/10/2010	11:53:36 AM	Bypass valve opened
12/10/2010	11:53:36 AM	Helium MFC set to  0.000000
12/10/2010	11:53:36 AM	H2 MFC set to  0.000000
12/10/2010	11:53:36 AM	BCl3 MFC set to  0.000000
12/10/2010	11:53:36 AM	PHl3 MFC set to  0.000000
12/10/2010	11:53:36 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:53:36 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:53:37 AM	Tube furnace set to 0
12/10/2010	11:54:37 AM	H2 valve closed
12/10/2010	11:54:37 AM	BCl3 valve closed
12/10/2010	11:54:37 AM	PH3 valve closed
12/10/2010	11:54:37 AM	SiCl4 pre valve closed
12/10/2010	11:54:37 AM	SiCl4 post valve closed
12/10/2010	11:54:37 AM	Bubbler valve closed
12/10/2010	11:54:37 AM	Helium valve opened
12/10/2010	11:54:37 AM	Main Vac valve opened
12/10/2010	11:54:37 AM	Bypass valve opened
12/10/2010	11:54:37 AM	Helium MFC set to  100.000000
12/10/2010	11:54:37 AM	H2 MFC set to  0.000000
12/10/2010	11:54:37 AM	BCl3 MFC set to  0.000000
12/10/2010	11:54:37 AM	PHl3 MFC set to  0.000000
12/10/2010	11:54:37 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:54:37 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:54:37 AM	Tube furnace set to 0
12/10/2010	11:55:37 AM	Helium valve closed
12/10/2010	11:55:37 AM	H2 valve closed
12/10/2010	11:55:37 AM	BCl3 valve closed
12/10/2010	11:55:37 AM	PH3 valve closed
12/10/2010	11:55:37 AM	SiCl4 pre valve closed
12/10/2010	11:55:37 AM	SiCl4 post valve closed
12/10/2010	11:55:37 AM	Bubbler valve closed
12/10/2010	11:55:37 AM	Main Vac valve opened
12/10/2010	11:55:37 AM	Bypass valve opened
12/10/2010	11:55:37 AM	Helium MFC set to  0.000000
12/10/2010	11:55:37 AM	H2 MFC set to  0.000000
12/10/2010	11:55:37 AM	BCl3 MFC set to  0.000000
12/10/2010	11:55:37 AM	PHl3 MFC set to  0.000000
12/10/2010	11:55:37 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:55:37 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:55:37 AM	Tube furnace set to 0
12/10/2010	11:56:37 AM	H2 valve closed
12/10/2010	11:56:37 AM	BCl3 valve closed
12/10/2010	11:56:37 AM	PH3 valve closed
12/10/2010	11:56:37 AM	SiCl4 pre valve closed
12/10/2010	11:56:37 AM	SiCl4 post valve closed
12/10/2010	11:56:37 AM	Bubbler valve closed
12/10/2010	11:56:37 AM	Helium valve opened
12/10/2010	11:56:37 AM	Main Vac valve opened
12/10/2010	11:56:37 AM	Bypass valve opened
12/10/2010	11:56:37 AM	Helium MFC set to  100.000000
12/10/2010	11:56:37 AM	H2 MFC set to  0.000000
12/10/2010	11:56:37 AM	BCl3 MFC set to  0.000000
12/10/2010	11:56:37 AM	PHl3 MFC set to  0.000000
12/10/2010	11:56:37 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:56:37 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:56:37 AM	Tube furnace set to 0
12/10/2010	11:57:37 AM	Helium valve closed
12/10/2010	11:57:37 AM	H2 valve closed
12/10/2010	11:57:37 AM	BCl3 valve closed
12/10/2010	11:57:37 AM	PH3 valve closed
12/10/2010	11:57:37 AM	SiCl4 pre valve closed
12/10/2010	11:57:37 AM	SiCl4 post valve closed
12/10/2010	11:57:37 AM	Bubbler valve closed
12/10/2010	11:57:37 AM	Main Vac valve opened
12/10/2010	11:57:37 AM	Bypass valve opened
12/10/2010	11:57:37 AM	Helium MFC set to  0.000000
12/10/2010	11:57:37 AM	H2 MFC set to  0.000000
12/10/2010	11:57:37 AM	BCl3 MFC set to  0.000000
12/10/2010	11:57:37 AM	PHl3 MFC set to  0.000000
12/10/2010	11:57:37 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:57:37 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:57:37 AM	Tube furnace set to 0
12/10/2010	11:58:37 AM	H2 valve closed
12/10/2010	11:58:37 AM	BCl3 valve closed
12/10/2010	11:58:37 AM	PH3 valve closed
12/10/2010	11:58:37 AM	SiCl4 pre valve closed
12/10/2010	11:58:37 AM	SiCl4 post valve closed
12/10/2010	11:58:37 AM	Bubbler valve closed
12/10/2010	11:58:37 AM	Helium valve opened
12/10/2010	11:58:37 AM	Main Vac valve opened
12/10/2010	11:58:37 AM	Bypass valve opened
12/10/2010	11:58:37 AM	Helium MFC set to  100.000000
12/10/2010	11:58:37 AM	H2 MFC set to  0.000000
12/10/2010	11:58:37 AM	BCl3 MFC set to  0.000000
12/10/2010	11:58:37 AM	PHl3 MFC set to  0.000000
12/10/2010	11:58:37 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:58:37 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:58:38 AM	Tube furnace set to 0
12/10/2010	11:59:38 AM	Helium valve closed
12/10/2010	11:59:38 AM	H2 valve closed
12/10/2010	11:59:38 AM	BCl3 valve closed
12/10/2010	11:59:38 AM	PH3 valve closed
12/10/2010	11:59:38 AM	SiCl4 pre valve closed
12/10/2010	11:59:38 AM	SiCl4 post valve closed
12/10/2010	11:59:38 AM	Bubbler valve closed
12/10/2010	11:59:38 AM	Main Vac valve opened
12/10/2010	11:59:38 AM	Bypass valve opened
12/10/2010	11:59:38 AM	Helium MFC set to  0.000000
12/10/2010	11:59:38 AM	H2 MFC set to  0.000000
12/10/2010	11:59:38 AM	BCl3 MFC set to  0.000000
12/10/2010	11:59:38 AM	PHl3 MFC set to  0.000000
12/10/2010	11:59:38 AM	SiCl4 MFC set to  0.000000
12/10/2010	11:59:38 AM	Bypass solenoid MFC set to  0.000000
12/10/2010	11:59:38 AM	Tube furnace set to 0
12/10/2010	12:00:38 PM	H2 valve closed
12/10/2010	12:00:38 PM	BCl3 valve closed
12/10/2010	12:00:38 PM	PH3 valve closed
12/10/2010	12:00:38 PM	SiCl4 pre valve closed
12/10/2010	12:00:38 PM	SiCl4 post valve closed
12/10/2010	12:00:38 PM	Bubbler valve closed
12/10/2010	12:00:38 PM	Helium valve opened
12/10/2010	12:00:38 PM	Main Vac valve opened
12/10/2010	12:00:38 PM	Bypass valve opened
12/10/2010	12:00:38 PM	Helium MFC set to  100.000000
12/10/2010	12:00:38 PM	H2 MFC set to  0.000000
12/10/2010	12:00:38 PM	BCl3 MFC set to  0.000000
12/10/2010	12:00:38 PM	PHl3 MFC set to  0.000000
12/10/2010	12:00:38 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:00:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:00:38 PM	Tube furnace set to 0
12/10/2010	12:01:38 PM	Helium valve closed
12/10/2010	12:01:38 PM	H2 valve closed
12/10/2010	12:01:38 PM	BCl3 valve closed
12/10/2010	12:01:38 PM	PH3 valve closed
12/10/2010	12:01:38 PM	SiCl4 pre valve closed
12/10/2010	12:01:38 PM	SiCl4 post valve closed
12/10/2010	12:01:38 PM	Bubbler valve closed
12/10/2010	12:01:38 PM	Main Vac valve opened
12/10/2010	12:01:38 PM	Bypass valve opened
12/10/2010	12:01:38 PM	Helium MFC set to  0.000000
12/10/2010	12:01:38 PM	H2 MFC set to  0.000000
12/10/2010	12:01:38 PM	BCl3 MFC set to  0.000000
12/10/2010	12:01:38 PM	PHl3 MFC set to  0.000000
12/10/2010	12:01:38 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:01:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:01:38 PM	Tube furnace set to 0
12/10/2010	12:02:38 PM	H2 valve closed
12/10/2010	12:02:38 PM	BCl3 valve closed
12/10/2010	12:02:38 PM	PH3 valve closed
12/10/2010	12:02:38 PM	SiCl4 pre valve closed
12/10/2010	12:02:38 PM	SiCl4 post valve closed
12/10/2010	12:02:38 PM	Bubbler valve closed
12/10/2010	12:02:38 PM	Helium valve opened
12/10/2010	12:02:38 PM	Main Vac valve opened
12/10/2010	12:02:38 PM	Bypass valve opened
12/10/2010	12:02:38 PM	Helium MFC set to  100.000000
12/10/2010	12:02:38 PM	H2 MFC set to  0.000000
12/10/2010	12:02:38 PM	BCl3 MFC set to  0.000000
12/10/2010	12:02:38 PM	PHl3 MFC set to  0.000000
12/10/2010	12:02:38 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:02:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:02:38 PM	Tube furnace set to 0
12/10/2010	12:03:38 PM	Helium valve closed
12/10/2010	12:03:38 PM	H2 valve closed
12/10/2010	12:03:38 PM	BCl3 valve closed
12/10/2010	12:03:38 PM	PH3 valve closed
12/10/2010	12:03:38 PM	SiCl4 pre valve closed
12/10/2010	12:03:38 PM	SiCl4 post valve closed
12/10/2010	12:03:38 PM	Bubbler valve closed
12/10/2010	12:03:38 PM	Main Vac valve opened
12/10/2010	12:03:38 PM	Bypass valve opened
12/10/2010	12:03:38 PM	Helium MFC set to  0.000000
12/10/2010	12:03:38 PM	H2 MFC set to  0.000000
12/10/2010	12:03:38 PM	BCl3 MFC set to  0.000000
12/10/2010	12:03:38 PM	PHl3 MFC set to  0.000000
12/10/2010	12:03:38 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:03:38 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:03:39 PM	Tube furnace set to 0
12/10/2010	12:04:39 PM	H2 valve closed
12/10/2010	12:04:39 PM	BCl3 valve closed
12/10/2010	12:04:39 PM	PH3 valve closed
12/10/2010	12:04:39 PM	SiCl4 pre valve closed
12/10/2010	12:04:39 PM	SiCl4 post valve closed
12/10/2010	12:04:39 PM	Bubbler valve closed
12/10/2010	12:04:39 PM	Helium valve opened
12/10/2010	12:04:39 PM	Main Vac valve opened
12/10/2010	12:04:39 PM	Bypass valve opened
12/10/2010	12:04:39 PM	Helium MFC set to  100.000000
12/10/2010	12:04:39 PM	H2 MFC set to  0.000000
12/10/2010	12:04:39 PM	BCl3 MFC set to  0.000000
12/10/2010	12:04:39 PM	PHl3 MFC set to  0.000000
12/10/2010	12:04:39 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:04:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:04:39 PM	Tube furnace set to 0
12/10/2010	12:05:39 PM	Helium valve closed
12/10/2010	12:05:39 PM	H2 valve closed
12/10/2010	12:05:39 PM	BCl3 valve closed
12/10/2010	12:05:39 PM	PH3 valve closed
12/10/2010	12:05:39 PM	SiCl4 pre valve closed
12/10/2010	12:05:39 PM	SiCl4 post valve closed
12/10/2010	12:05:39 PM	Bubbler valve closed
12/10/2010	12:05:39 PM	Main Vac valve opened
12/10/2010	12:05:39 PM	Bypass valve opened
12/10/2010	12:05:39 PM	Helium MFC set to  0.000000
12/10/2010	12:05:39 PM	H2 MFC set to  0.000000
12/10/2010	12:05:39 PM	BCl3 MFC set to  0.000000
12/10/2010	12:05:39 PM	PHl3 MFC set to  0.000000
12/10/2010	12:05:39 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:05:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:05:39 PM	Tube furnace set to 0
12/10/2010	12:06:39 PM	H2 valve closed
12/10/2010	12:06:39 PM	BCl3 valve closed
12/10/2010	12:06:39 PM	PH3 valve closed
12/10/2010	12:06:39 PM	SiCl4 pre valve closed
12/10/2010	12:06:39 PM	SiCl4 post valve closed
12/10/2010	12:06:39 PM	Bubbler valve closed
12/10/2010	12:06:39 PM	Helium valve opened
12/10/2010	12:06:39 PM	Main Vac valve opened
12/10/2010	12:06:39 PM	Bypass valve opened
12/10/2010	12:06:39 PM	Helium MFC set to  100.000000
12/10/2010	12:06:39 PM	H2 MFC set to  0.000000
12/10/2010	12:06:39 PM	BCl3 MFC set to  0.000000
12/10/2010	12:06:39 PM	PHl3 MFC set to  0.000000
12/10/2010	12:06:39 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:06:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:06:39 PM	Tube furnace set to 0
12/10/2010	12:07:39 PM	Helium valve closed
12/10/2010	12:07:39 PM	H2 valve closed
12/10/2010	12:07:39 PM	BCl3 valve closed
12/10/2010	12:07:39 PM	PH3 valve closed
12/10/2010	12:07:39 PM	SiCl4 pre valve closed
12/10/2010	12:07:39 PM	SiCl4 post valve closed
12/10/2010	12:07:39 PM	Bubbler valve closed
12/10/2010	12:07:39 PM	Main Vac valve opened
12/10/2010	12:07:39 PM	Bypass valve opened
12/10/2010	12:07:39 PM	Helium MFC set to  0.000000
12/10/2010	12:07:39 PM	H2 MFC set to  0.000000
12/10/2010	12:07:39 PM	BCl3 MFC set to  0.000000
12/10/2010	12:07:39 PM	PHl3 MFC set to  0.000000
12/10/2010	12:07:39 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:07:39 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:07:39 PM	Tube furnace set to 0
12/10/2010	12:07:40 PM	Run finished at 12:07 PM
12/10/2010	12:07:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	12:14:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	12:14:27 PM	Recipe started at 12:14 PM
12/10/2010	12:14:27 PM	Helium valve closed
12/10/2010	12:14:27 PM	H2 valve closed
12/10/2010	12:14:27 PM	BCl3 valve closed
12/10/2010	12:14:27 PM	PH3 valve closed
12/10/2010	12:14:27 PM	SiCl4 pre valve closed
12/10/2010	12:14:27 PM	SiCl4 post valve closed
12/10/2010	12:14:27 PM	Main Vac valve closed
12/10/2010	12:14:27 PM	Bubbler valve closed
12/10/2010	12:14:27 PM	Bypass valve opened
12/10/2010	12:14:27 PM	Helium MFC set to  0.000000
12/10/2010	12:14:27 PM	H2 MFC set to  0.000000
12/10/2010	12:14:27 PM	BCl3 MFC set to  0.000000
12/10/2010	12:14:27 PM	PHl3 MFC set to  0.000000
12/10/2010	12:14:27 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:14:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:14:27 PM	Tube furnace set to 0
12/10/2010	12:14:28 PM	Helium valve closed
12/10/2010	12:14:28 PM	H2 valve closed
12/10/2010	12:14:28 PM	BCl3 valve closed
12/10/2010	12:14:28 PM	PH3 valve closed
12/10/2010	12:14:28 PM	SiCl4 pre valve closed
12/10/2010	12:14:28 PM	SiCl4 post valve closed
12/10/2010	12:14:28 PM	Bubbler valve closed
12/10/2010	12:14:28 PM	Main Vac valve opened
12/10/2010	12:14:28 PM	Bypass valve opened
12/10/2010	12:14:28 PM	Helium MFC set to  0.000000
12/10/2010	12:14:28 PM	H2 MFC set to  0.000000
12/10/2010	12:14:28 PM	BCl3 MFC set to  0.000000
12/10/2010	12:14:28 PM	PHl3 MFC set to  0.000000
12/10/2010	12:14:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:14:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:14:28 PM	Tube furnace set to 0
12/10/2010	12:15:28 PM	H2 valve closed
12/10/2010	12:15:28 PM	BCl3 valve closed
12/10/2010	12:15:28 PM	PH3 valve closed
12/10/2010	12:15:28 PM	SiCl4 pre valve closed
12/10/2010	12:15:28 PM	SiCl4 post valve closed
12/10/2010	12:15:28 PM	Bubbler valve closed
12/10/2010	12:15:28 PM	Helium valve opened
12/10/2010	12:15:28 PM	Main Vac valve opened
12/10/2010	12:15:28 PM	Bypass valve opened
12/10/2010	12:15:28 PM	Helium MFC set to  100.000000
12/10/2010	12:15:28 PM	H2 MFC set to  0.000000
12/10/2010	12:15:28 PM	BCl3 MFC set to  0.000000
12/10/2010	12:15:28 PM	PHl3 MFC set to  0.000000
12/10/2010	12:15:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:15:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:15:28 PM	Tube furnace set to 0
12/10/2010	12:16:28 PM	Helium valve closed
12/10/2010	12:16:28 PM	H2 valve closed
12/10/2010	12:16:28 PM	BCl3 valve closed
12/10/2010	12:16:28 PM	PH3 valve closed
12/10/2010	12:16:28 PM	SiCl4 pre valve closed
12/10/2010	12:16:28 PM	SiCl4 post valve closed
12/10/2010	12:16:28 PM	Bubbler valve closed
12/10/2010	12:16:28 PM	Main Vac valve opened
12/10/2010	12:16:28 PM	Bypass valve opened
12/10/2010	12:16:28 PM	Helium MFC set to  0.000000
12/10/2010	12:16:28 PM	H2 MFC set to  0.000000
12/10/2010	12:16:28 PM	BCl3 MFC set to  0.000000
12/10/2010	12:16:28 PM	PHl3 MFC set to  0.000000
12/10/2010	12:16:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:16:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:16:28 PM	Tube furnace set to 0
12/10/2010	12:17:28 PM	H2 valve closed
12/10/2010	12:17:28 PM	BCl3 valve closed
12/10/2010	12:17:28 PM	PH3 valve closed
12/10/2010	12:17:28 PM	SiCl4 pre valve closed
12/10/2010	12:17:28 PM	SiCl4 post valve closed
12/10/2010	12:17:28 PM	Bubbler valve closed
12/10/2010	12:17:28 PM	Helium valve opened
12/10/2010	12:17:28 PM	Main Vac valve opened
12/10/2010	12:17:28 PM	Bypass valve opened
12/10/2010	12:17:28 PM	Helium MFC set to  100.000000
12/10/2010	12:17:28 PM	H2 MFC set to  0.000000
12/10/2010	12:17:28 PM	BCl3 MFC set to  0.000000
12/10/2010	12:17:28 PM	PHl3 MFC set to  0.000000
12/10/2010	12:17:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:17:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:17:28 PM	Tube furnace set to 0
12/10/2010	12:18:28 PM	Helium valve closed
12/10/2010	12:18:28 PM	H2 valve closed
12/10/2010	12:18:28 PM	BCl3 valve closed
12/10/2010	12:18:28 PM	PH3 valve closed
12/10/2010	12:18:28 PM	SiCl4 pre valve closed
12/10/2010	12:18:28 PM	SiCl4 post valve closed
12/10/2010	12:18:28 PM	Bubbler valve closed
12/10/2010	12:18:28 PM	Main Vac valve opened
12/10/2010	12:18:28 PM	Bypass valve opened
12/10/2010	12:18:28 PM	Helium MFC set to  0.000000
12/10/2010	12:18:28 PM	H2 MFC set to  0.000000
12/10/2010	12:18:28 PM	BCl3 MFC set to  0.000000
12/10/2010	12:18:28 PM	PHl3 MFC set to  0.000000
12/10/2010	12:18:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:18:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:18:29 PM	Tube furnace set to 0
12/10/2010	12:19:29 PM	H2 valve closed
12/10/2010	12:19:29 PM	BCl3 valve closed
12/10/2010	12:19:29 PM	PH3 valve closed
12/10/2010	12:19:29 PM	SiCl4 pre valve closed
12/10/2010	12:19:29 PM	SiCl4 post valve closed
12/10/2010	12:19:29 PM	Bubbler valve closed
12/10/2010	12:19:29 PM	Helium valve opened
12/10/2010	12:19:29 PM	Main Vac valve opened
12/10/2010	12:19:29 PM	Bypass valve opened
12/10/2010	12:19:29 PM	Helium MFC set to  100.000000
12/10/2010	12:19:29 PM	H2 MFC set to  0.000000
12/10/2010	12:19:29 PM	BCl3 MFC set to  0.000000
12/10/2010	12:19:29 PM	PHl3 MFC set to  0.000000
12/10/2010	12:19:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:19:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:19:29 PM	Tube furnace set to 0
12/10/2010	12:20:29 PM	Helium valve closed
12/10/2010	12:20:29 PM	H2 valve closed
12/10/2010	12:20:29 PM	BCl3 valve closed
12/10/2010	12:20:29 PM	PH3 valve closed
12/10/2010	12:20:29 PM	SiCl4 pre valve closed
12/10/2010	12:20:29 PM	SiCl4 post valve closed
12/10/2010	12:20:29 PM	Bubbler valve closed
12/10/2010	12:20:29 PM	Main Vac valve opened
12/10/2010	12:20:29 PM	Bypass valve opened
12/10/2010	12:20:29 PM	Helium MFC set to  0.000000
12/10/2010	12:20:29 PM	H2 MFC set to  0.000000
12/10/2010	12:20:29 PM	BCl3 MFC set to  0.000000
12/10/2010	12:20:29 PM	PHl3 MFC set to  0.000000
12/10/2010	12:20:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:20:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:20:29 PM	Tube furnace set to 0
12/10/2010	12:21:29 PM	H2 valve closed
12/10/2010	12:21:29 PM	BCl3 valve closed
12/10/2010	12:21:29 PM	PH3 valve closed
12/10/2010	12:21:29 PM	SiCl4 pre valve closed
12/10/2010	12:21:29 PM	SiCl4 post valve closed
12/10/2010	12:21:29 PM	Bubbler valve closed
12/10/2010	12:21:29 PM	Helium valve opened
12/10/2010	12:21:29 PM	Main Vac valve opened
12/10/2010	12:21:29 PM	Bypass valve opened
12/10/2010	12:21:29 PM	Helium MFC set to  100.000000
12/10/2010	12:21:29 PM	H2 MFC set to  0.000000
12/10/2010	12:21:29 PM	BCl3 MFC set to  0.000000
12/10/2010	12:21:29 PM	PHl3 MFC set to  0.000000
12/10/2010	12:21:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:21:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:21:29 PM	Tube furnace set to 0
12/10/2010	12:22:29 PM	Helium valve closed
12/10/2010	12:22:29 PM	H2 valve closed
12/10/2010	12:22:29 PM	BCl3 valve closed
12/10/2010	12:22:29 PM	PH3 valve closed
12/10/2010	12:22:29 PM	SiCl4 pre valve closed
12/10/2010	12:22:29 PM	SiCl4 post valve closed
12/10/2010	12:22:29 PM	Bubbler valve closed
12/10/2010	12:22:29 PM	Main Vac valve opened
12/10/2010	12:22:29 PM	Bypass valve opened
12/10/2010	12:22:29 PM	Helium MFC set to  0.000000
12/10/2010	12:22:29 PM	H2 MFC set to  0.000000
12/10/2010	12:22:29 PM	BCl3 MFC set to  0.000000
12/10/2010	12:22:29 PM	PHl3 MFC set to  0.000000
12/10/2010	12:22:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:22:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:22:29 PM	Tube furnace set to 0
12/10/2010	12:23:29 PM	H2 valve closed
12/10/2010	12:23:29 PM	BCl3 valve closed
12/10/2010	12:23:29 PM	PH3 valve closed
12/10/2010	12:23:29 PM	SiCl4 pre valve closed
12/10/2010	12:23:29 PM	SiCl4 post valve closed
12/10/2010	12:23:29 PM	Bubbler valve closed
12/10/2010	12:23:29 PM	Helium valve opened
12/10/2010	12:23:29 PM	Main Vac valve opened
12/10/2010	12:23:29 PM	Bypass valve opened
12/10/2010	12:23:29 PM	Helium MFC set to  100.000000
12/10/2010	12:23:29 PM	H2 MFC set to  0.000000
12/10/2010	12:23:29 PM	BCl3 MFC set to  0.000000
12/10/2010	12:23:29 PM	PHl3 MFC set to  0.000000
12/10/2010	12:23:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:23:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:23:30 PM	Tube furnace set to 0
12/10/2010	12:24:30 PM	Helium valve closed
12/10/2010	12:24:30 PM	H2 valve closed
12/10/2010	12:24:30 PM	BCl3 valve closed
12/10/2010	12:24:30 PM	PH3 valve closed
12/10/2010	12:24:30 PM	SiCl4 pre valve closed
12/10/2010	12:24:30 PM	SiCl4 post valve closed
12/10/2010	12:24:30 PM	Bubbler valve closed
12/10/2010	12:24:30 PM	Main Vac valve opened
12/10/2010	12:24:30 PM	Bypass valve opened
12/10/2010	12:24:30 PM	Helium MFC set to  0.000000
12/10/2010	12:24:30 PM	H2 MFC set to  0.000000
12/10/2010	12:24:30 PM	BCl3 MFC set to  0.000000
12/10/2010	12:24:30 PM	PHl3 MFC set to  0.000000
12/10/2010	12:24:30 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:24:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:24:30 PM	Tube furnace set to 0
12/10/2010	12:25:30 PM	H2 valve closed
12/10/2010	12:25:30 PM	BCl3 valve closed
12/10/2010	12:25:30 PM	PH3 valve closed
12/10/2010	12:25:30 PM	SiCl4 pre valve closed
12/10/2010	12:25:30 PM	SiCl4 post valve closed
12/10/2010	12:25:30 PM	Bubbler valve closed
12/10/2010	12:25:30 PM	Helium valve opened
12/10/2010	12:25:30 PM	Main Vac valve opened
12/10/2010	12:25:30 PM	Bypass valve opened
12/10/2010	12:25:30 PM	Helium MFC set to  100.000000
12/10/2010	12:25:30 PM	H2 MFC set to  0.000000
12/10/2010	12:25:30 PM	BCl3 MFC set to  0.000000
12/10/2010	12:25:30 PM	PHl3 MFC set to  0.000000
12/10/2010	12:25:30 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:25:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:25:30 PM	Tube furnace set to 0
12/10/2010	12:26:22 PM	Run aborted at 12:26 PM
12/10/2010	12:26:22 PM	Helium valve closed
12/10/2010	12:26:22 PM	H2 valve closed
12/10/2010	12:26:22 PM	BCl3 valve closed
12/10/2010	12:26:22 PM	PH3 valve closed
12/10/2010	12:26:22 PM	SiCl4 pre valve closed
12/10/2010	12:26:22 PM	SiCl4 post valve closed
12/10/2010	12:26:22 PM	Bypass valve closed
12/10/2010	12:26:22 PM	Main Vac valve closed
12/10/2010	12:26:22 PM	Bubbler valve closed
12/10/2010	12:26:22 PM	Helium MFC set to  0.000000
12/10/2010	12:26:22 PM	H2 MFC set to  0.000000
12/10/2010	12:26:22 PM	BCl3 MFC set to  0.000000
12/10/2010	12:26:22 PM	PHl3 MFC set to  0.000000
12/10/2010	12:26:22 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:26:22 PM	Tube furnace set to 0
12/10/2010	12:26:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	12:26:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2010	12:26:26 PM	Recipe started at 12:26 PM
12/10/2010	12:26:26 PM	Helium valve closed
12/10/2010	12:26:26 PM	H2 valve closed
12/10/2010	12:26:26 PM	BCl3 valve closed
12/10/2010	12:26:26 PM	PH3 valve closed
12/10/2010	12:26:26 PM	SiCl4 pre valve closed
12/10/2010	12:26:26 PM	SiCl4 post valve closed
12/10/2010	12:26:26 PM	Main Vac valve closed
12/10/2010	12:26:26 PM	Bubbler valve closed
12/10/2010	12:26:26 PM	Bypass valve opened
12/10/2010	12:26:26 PM	Helium MFC set to  0.000000
12/10/2010	12:26:26 PM	H2 MFC set to  0.000000
12/10/2010	12:26:26 PM	BCl3 MFC set to  0.000000
12/10/2010	12:26:26 PM	PHl3 MFC set to  0.000000
12/10/2010	12:26:26 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:26:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:26:26 PM	Tube furnace set to 0
12/10/2010	12:26:26 PM	Helium valve closed
12/10/2010	12:26:26 PM	H2 valve closed
12/10/2010	12:26:26 PM	BCl3 valve closed
12/10/2010	12:26:26 PM	PH3 valve closed
12/10/2010	12:26:26 PM	SiCl4 pre valve closed
12/10/2010	12:26:26 PM	SiCl4 post valve closed
12/10/2010	12:26:26 PM	Bubbler valve closed
12/10/2010	12:26:26 PM	Main Vac valve opened
12/10/2010	12:26:26 PM	Bypass valve opened
12/10/2010	12:26:26 PM	Helium MFC set to  0.000000
12/10/2010	12:26:26 PM	H2 MFC set to  0.000000
12/10/2010	12:26:26 PM	BCl3 MFC set to  0.000000
12/10/2010	12:26:26 PM	PHl3 MFC set to  0.000000
12/10/2010	12:26:26 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:26:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:26:26 PM	Tube furnace set to 0
12/10/2010	12:26:27 PM	Run finished at 12:26 PM
12/10/2010	12:26:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2010	12:28:21 PM	Main Vac valve closed
12/10/2010	12:28:21 PM	Bypass valve closed
12/10/2010	12:28:32 PM	Bypass valve opened
12/10/2010	12:28:32 PM	Main Vac valve opened
12/10/2010	12:30:08 PM	Recipe started at 12:30 PM
12/10/2010	12:30:08 PM	Helium valve closed
12/10/2010	12:30:08 PM	BCl3 valve closed
12/10/2010	12:30:08 PM	PH3 valve closed
12/10/2010	12:30:08 PM	SiCl4 pre valve closed
12/10/2010	12:30:08 PM	SiCl4 post valve closed
12/10/2010	12:30:08 PM	Main Vac valve closed
12/10/2010	12:30:08 PM	Bypass valve closed
12/10/2010	12:30:08 PM	Bubbler valve closed
12/10/2010	12:30:08 PM	H2 valve opened
12/10/2010	12:30:08 PM	Helium MFC set to  0.000000
12/10/2010	12:30:08 PM	H2 MFC set to  500.000000
12/10/2010	12:30:08 PM	BCl3 MFC set to  0.000000
12/10/2010	12:30:08 PM	PHl3 MFC set to  0.000000
12/10/2010	12:30:08 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:30:08 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:30:08 PM	Tube furnace set to 0
12/10/2010	12:31:31 PM	Helium valve closed
12/10/2010	12:31:31 PM	BCl3 valve closed
12/10/2010	12:31:31 PM	PH3 valve closed
12/10/2010	12:31:31 PM	SiCl4 pre valve closed
12/10/2010	12:31:31 PM	SiCl4 post valve closed
12/10/2010	12:31:31 PM	Main Vac valve closed
12/10/2010	12:31:31 PM	Bypass valve closed
12/10/2010	12:31:31 PM	H2 valve opened
12/10/2010	12:31:31 PM	Bubbler valve opened
12/10/2010	12:31:31 PM	Helium MFC set to  0.000000
12/10/2010	12:31:31 PM	H2 MFC set to  500.000000
12/10/2010	12:31:31 PM	BCl3 MFC set to  0.000000
12/10/2010	12:31:31 PM	PHl3 MFC set to  0.000000
12/10/2010	12:31:31 PM	SiCl4 MFC set to  0.000000
12/10/2010	12:31:31 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:31:31 PM	Tube furnace set to 1000
12/10/2010	12:51:31 PM	Helium valve closed
12/10/2010	12:51:31 PM	BCl3 valve closed
12/10/2010	12:51:31 PM	Main Vac valve closed
12/10/2010	12:51:31 PM	Bypass valve closed
12/10/2010	12:51:31 PM	H2 valve opened
12/10/2010	12:51:31 PM	PH3 valve opened
12/10/2010	12:51:31 PM	SiCl4 pre valve opened
12/10/2010	12:51:31 PM	SiCl4 post valve opened
12/10/2010	12:51:31 PM	Bubbler valve opened
12/10/2010	12:51:31 PM	Helium MFC set to  0.000000
12/10/2010	12:51:31 PM	H2 MFC set to  500.000000
12/10/2010	12:51:31 PM	BCl3 MFC set to  0.000000
12/10/2010	12:51:31 PM	PHl3 MFC set to  1.000000
12/10/2010	12:51:31 PM	SiCl4 MFC set to  50.000000
12/10/2010	12:51:31 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	12:51:31 PM	Tube furnace set to 1000
12/10/2010	1:21:31 PM	H2 valve closed
12/10/2010	1:21:31 PM	BCl3 valve closed
12/10/2010	1:21:31 PM	PH3 valve closed
12/10/2010	1:21:31 PM	SiCl4 pre valve closed
12/10/2010	1:21:31 PM	SiCl4 post valve closed
12/10/2010	1:21:31 PM	Main Vac valve closed
12/10/2010	1:21:31 PM	Bypass valve closed
12/10/2010	1:21:31 PM	Helium valve opened
12/10/2010	1:21:31 PM	Bubbler valve opened
12/10/2010	1:21:31 PM	Helium MFC set to  500.000000
12/10/2010	1:21:31 PM	H2 MFC set to  0.000000
12/10/2010	1:21:31 PM	BCl3 MFC set to  0.000000
12/10/2010	1:21:31 PM	PHl3 MFC set to  0.000000
12/10/2010	1:21:31 PM	SiCl4 MFC set to  0.000000
12/10/2010	1:21:31 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	1:21:31 PM	Tube furnace set to 0
12/10/2010	1:41:31 PM	Helium valve closed
12/10/2010	1:41:31 PM	H2 valve closed
12/10/2010	1:41:31 PM	BCl3 valve closed
12/10/2010	1:41:31 PM	PH3 valve closed
12/10/2010	1:41:31 PM	SiCl4 pre valve closed
12/10/2010	1:41:31 PM	SiCl4 post valve closed
12/10/2010	1:41:31 PM	Main Vac valve closed
12/10/2010	1:41:31 PM	Bypass valve closed
12/10/2010	1:41:31 PM	Bubbler valve closed
12/10/2010	1:41:31 PM	Helium MFC set to  0.000000
12/10/2010	1:41:31 PM	H2 MFC set to  0.000000
12/10/2010	1:41:31 PM	BCl3 MFC set to  0.000000
12/10/2010	1:41:31 PM	PHl3 MFC set to  0.000000
12/10/2010	1:41:31 PM	SiCl4 MFC set to  0.000000
12/10/2010	1:41:31 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	1:41:31 PM	Tube furnace set to 0
12/10/2010	1:41:32 PM	Run finished at 1:41 PM
12/10/2010	1:43:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2010	1:43:59 PM	Recipe started at 1:43 PM
12/10/2010	1:43:59 PM	Helium valve closed
12/10/2010	1:43:59 PM	H2 valve closed
12/10/2010	1:43:59 PM	BCl3 valve closed
12/10/2010	1:43:59 PM	PH3 valve closed
12/10/2010	1:43:59 PM	SiCl4 pre valve closed
12/10/2010	1:43:59 PM	SiCl4 post valve closed
12/10/2010	1:43:59 PM	Main Vac valve closed
12/10/2010	1:43:59 PM	Bubbler valve closed
12/10/2010	1:43:59 PM	Bypass valve opened
12/10/2010	1:43:59 PM	Helium MFC set to  0.000000
12/10/2010	1:43:59 PM	H2 MFC set to  0.000000
12/10/2010	1:43:59 PM	BCl3 MFC set to  0.000000
12/10/2010	1:43:59 PM	PHl3 MFC set to  0.000000
12/10/2010	1:43:59 PM	SiCl4 MFC set to  0.000000
12/10/2010	1:43:59 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	1:44:00 PM	Tube furnace set to 0
12/10/2010	1:44:54 PM	Helium valve closed
12/10/2010	1:44:54 PM	H2 valve closed
12/10/2010	1:44:54 PM	BCl3 valve closed
12/10/2010	1:44:54 PM	PH3 valve closed
12/10/2010	1:44:54 PM	SiCl4 pre valve closed
12/10/2010	1:44:54 PM	SiCl4 post valve closed
12/10/2010	1:44:54 PM	Bubbler valve closed
12/10/2010	1:44:54 PM	Main Vac valve opened
12/10/2010	1:44:54 PM	Bypass valve opened
12/10/2010	1:44:54 PM	Helium MFC set to  0.000000
12/10/2010	1:44:54 PM	H2 MFC set to  0.000000
12/10/2010	1:44:54 PM	BCl3 MFC set to  0.000000
12/10/2010	1:44:54 PM	PHl3 MFC set to  0.000000
12/10/2010	1:44:54 PM	SiCl4 MFC set to  0.000000
12/10/2010	1:44:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	1:44:54 PM	Tube furnace set to 0
12/10/2010	1:44:54 PM	Run finished at 1:44 PM
12/10/2010	1:44:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2010	2:00:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/10/2010	2:00:50 PM	Recipe started at 2:00 PM
12/10/2010	2:00:50 PM	H2 valve closed
12/10/2010	2:00:50 PM	BCl3 valve closed
12/10/2010	2:00:50 PM	PH3 valve closed
12/10/2010	2:00:50 PM	SiCl4 pre valve closed
12/10/2010	2:00:50 PM	SiCl4 post valve closed
12/10/2010	2:00:50 PM	Main Vac valve closed
12/10/2010	2:00:50 PM	Bypass valve closed
12/10/2010	2:00:50 PM	Bubbler valve closed
12/10/2010	2:00:50 PM	Helium valve opened
12/10/2010	2:00:50 PM	Helium MFC set to  500.000000
12/10/2010	2:00:50 PM	H2 MFC set to  0.000000
12/10/2010	2:00:50 PM	BCl3 MFC set to  0.000000
12/10/2010	2:00:50 PM	PHl3 MFC set to  0.000000
12/10/2010	2:00:50 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:00:50 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:00:50 PM	Tube furnace set to 0
12/10/2010	2:02:05 PM	Helium valve closed
12/10/2010	2:02:05 PM	H2 valve closed
12/10/2010	2:02:05 PM	BCl3 valve closed
12/10/2010	2:02:05 PM	PH3 valve closed
12/10/2010	2:02:05 PM	SiCl4 pre valve closed
12/10/2010	2:02:05 PM	SiCl4 post valve closed
12/10/2010	2:02:05 PM	Main Vac valve closed
12/10/2010	2:02:05 PM	Bypass valve closed
12/10/2010	2:02:05 PM	Bubbler valve closed
12/10/2010	2:02:05 PM	Helium MFC set to  0.000000
12/10/2010	2:02:05 PM	H2 MFC set to  0.000000
12/10/2010	2:02:05 PM	BCl3 MFC set to  0.000000
12/10/2010	2:02:05 PM	PHl3 MFC set to  0.000000
12/10/2010	2:02:05 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:02:05 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:02:05 PM	Tube furnace set to 0
12/10/2010	2:02:05 PM	Run finished at 2:02 PM
12/10/2010	2:02:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
12/10/2010	2:09:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2010	2:09:16 PM	Recipe started at 2:09 PM
12/10/2010	2:09:16 PM	Helium valve closed
12/10/2010	2:09:16 PM	H2 valve closed
12/10/2010	2:09:16 PM	BCl3 valve closed
12/10/2010	2:09:16 PM	PH3 valve closed
12/10/2010	2:09:16 PM	SiCl4 pre valve closed
12/10/2010	2:09:16 PM	SiCl4 post valve closed
12/10/2010	2:09:16 PM	Main Vac valve closed
12/10/2010	2:09:16 PM	Bubbler valve closed
12/10/2010	2:09:16 PM	Bypass valve opened
12/10/2010	2:09:16 PM	Helium MFC set to  0.000000
12/10/2010	2:09:16 PM	H2 MFC set to  0.000000
12/10/2010	2:09:16 PM	BCl3 MFC set to  0.000000
12/10/2010	2:09:16 PM	PHl3 MFC set to  0.000000
12/10/2010	2:09:16 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:09:16 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:09:16 PM	Tube furnace set to 0
12/10/2010	2:10:09 PM	Helium valve closed
12/10/2010	2:10:09 PM	H2 valve closed
12/10/2010	2:10:09 PM	BCl3 valve closed
12/10/2010	2:10:09 PM	PH3 valve closed
12/10/2010	2:10:09 PM	SiCl4 pre valve closed
12/10/2010	2:10:09 PM	SiCl4 post valve closed
12/10/2010	2:10:09 PM	Bubbler valve closed
12/10/2010	2:10:09 PM	Main Vac valve opened
12/10/2010	2:10:09 PM	Bypass valve opened
12/10/2010	2:10:09 PM	Helium MFC set to  0.000000
12/10/2010	2:10:09 PM	H2 MFC set to  0.000000
12/10/2010	2:10:09 PM	BCl3 MFC set to  0.000000
12/10/2010	2:10:09 PM	PHl3 MFC set to  0.000000
12/10/2010	2:10:09 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:10:09 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:10:09 PM	Tube furnace set to 0
12/10/2010	2:10:09 PM	Run finished at 2:10 PM
12/10/2010	2:10:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2010	2:15:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	2:15:51 PM	Recipe started at 2:15 PM
12/10/2010	2:15:51 PM	Helium valve closed
12/10/2010	2:15:51 PM	H2 valve closed
12/10/2010	2:15:51 PM	BCl3 valve closed
12/10/2010	2:15:51 PM	PH3 valve closed
12/10/2010	2:15:51 PM	SiCl4 pre valve closed
12/10/2010	2:15:51 PM	SiCl4 post valve closed
12/10/2010	2:15:51 PM	Main Vac valve closed
12/10/2010	2:15:51 PM	Bubbler valve closed
12/10/2010	2:15:51 PM	Bypass valve opened
12/10/2010	2:15:51 PM	Helium MFC set to  0.000000
12/10/2010	2:15:51 PM	H2 MFC set to  0.000000
12/10/2010	2:15:51 PM	BCl3 MFC set to  0.000000
12/10/2010	2:15:51 PM	PHl3 MFC set to  0.000000
12/10/2010	2:15:51 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:15:51 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:15:51 PM	Tube furnace set to 0
12/10/2010	2:15:51 PM	Helium valve closed
12/10/2010	2:15:51 PM	H2 valve closed
12/10/2010	2:15:51 PM	BCl3 valve closed
12/10/2010	2:15:51 PM	PH3 valve closed
12/10/2010	2:15:51 PM	SiCl4 pre valve closed
12/10/2010	2:15:51 PM	SiCl4 post valve closed
12/10/2010	2:15:51 PM	Bubbler valve closed
12/10/2010	2:15:51 PM	Main Vac valve opened
12/10/2010	2:15:51 PM	Bypass valve opened
12/10/2010	2:15:52 PM	Helium MFC set to  0.000000
12/10/2010	2:15:52 PM	H2 MFC set to  0.000000
12/10/2010	2:15:52 PM	BCl3 MFC set to  0.000000
12/10/2010	2:15:52 PM	PHl3 MFC set to  0.000000
12/10/2010	2:15:52 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:15:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:15:52 PM	Tube furnace set to 0
12/10/2010	2:16:52 PM	H2 valve closed
12/10/2010	2:16:52 PM	BCl3 valve closed
12/10/2010	2:16:52 PM	PH3 valve closed
12/10/2010	2:16:52 PM	SiCl4 pre valve closed
12/10/2010	2:16:52 PM	SiCl4 post valve closed
12/10/2010	2:16:52 PM	Bubbler valve closed
12/10/2010	2:16:52 PM	Helium valve opened
12/10/2010	2:16:52 PM	Main Vac valve opened
12/10/2010	2:16:52 PM	Bypass valve opened
12/10/2010	2:16:52 PM	Helium MFC set to  100.000000
12/10/2010	2:16:52 PM	H2 MFC set to  0.000000
12/10/2010	2:16:52 PM	BCl3 MFC set to  0.000000
12/10/2010	2:16:52 PM	PHl3 MFC set to  0.000000
12/10/2010	2:16:52 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:16:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:16:52 PM	Tube furnace set to 0
12/10/2010	2:17:52 PM	Helium valve closed
12/10/2010	2:17:52 PM	H2 valve closed
12/10/2010	2:17:52 PM	BCl3 valve closed
12/10/2010	2:17:52 PM	PH3 valve closed
12/10/2010	2:17:52 PM	SiCl4 pre valve closed
12/10/2010	2:17:52 PM	SiCl4 post valve closed
12/10/2010	2:17:52 PM	Bubbler valve closed
12/10/2010	2:17:52 PM	Main Vac valve opened
12/10/2010	2:17:52 PM	Bypass valve opened
12/10/2010	2:17:52 PM	Helium MFC set to  0.000000
12/10/2010	2:17:52 PM	H2 MFC set to  0.000000
12/10/2010	2:17:52 PM	BCl3 MFC set to  0.000000
12/10/2010	2:17:52 PM	PHl3 MFC set to  0.000000
12/10/2010	2:17:52 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:17:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:17:52 PM	Tube furnace set to 0
12/10/2010	2:18:52 PM	H2 valve closed
12/10/2010	2:18:52 PM	BCl3 valve closed
12/10/2010	2:18:52 PM	PH3 valve closed
12/10/2010	2:18:52 PM	SiCl4 pre valve closed
12/10/2010	2:18:52 PM	SiCl4 post valve closed
12/10/2010	2:18:52 PM	Bubbler valve closed
12/10/2010	2:18:52 PM	Helium valve opened
12/10/2010	2:18:52 PM	Main Vac valve opened
12/10/2010	2:18:52 PM	Bypass valve opened
12/10/2010	2:18:52 PM	Helium MFC set to  100.000000
12/10/2010	2:18:52 PM	H2 MFC set to  0.000000
12/10/2010	2:18:52 PM	BCl3 MFC set to  0.000000
12/10/2010	2:18:52 PM	PHl3 MFC set to  0.000000
12/10/2010	2:18:52 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:18:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:18:52 PM	Tube furnace set to 0
12/10/2010	2:19:52 PM	Helium valve closed
12/10/2010	2:19:52 PM	H2 valve closed
12/10/2010	2:19:52 PM	BCl3 valve closed
12/10/2010	2:19:52 PM	PH3 valve closed
12/10/2010	2:19:52 PM	SiCl4 pre valve closed
12/10/2010	2:19:52 PM	SiCl4 post valve closed
12/10/2010	2:19:52 PM	Bubbler valve closed
12/10/2010	2:19:52 PM	Main Vac valve opened
12/10/2010	2:19:52 PM	Bypass valve opened
12/10/2010	2:19:52 PM	Helium MFC set to  0.000000
12/10/2010	2:19:52 PM	H2 MFC set to  0.000000
12/10/2010	2:19:52 PM	BCl3 MFC set to  0.000000
12/10/2010	2:19:52 PM	PHl3 MFC set to  0.000000
12/10/2010	2:19:52 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:19:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:19:52 PM	Tube furnace set to 0
12/10/2010	2:20:52 PM	H2 valve closed
12/10/2010	2:20:52 PM	BCl3 valve closed
12/10/2010	2:20:52 PM	PH3 valve closed
12/10/2010	2:20:52 PM	SiCl4 pre valve closed
12/10/2010	2:20:52 PM	SiCl4 post valve closed
12/10/2010	2:20:52 PM	Bubbler valve closed
12/10/2010	2:20:52 PM	Helium valve opened
12/10/2010	2:20:52 PM	Main Vac valve opened
12/10/2010	2:20:52 PM	Bypass valve opened
12/10/2010	2:20:52 PM	Helium MFC set to  100.000000
12/10/2010	2:20:52 PM	H2 MFC set to  0.000000
12/10/2010	2:20:52 PM	BCl3 MFC set to  0.000000
12/10/2010	2:20:52 PM	PHl3 MFC set to  0.000000
12/10/2010	2:20:52 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:20:52 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:20:53 PM	Tube furnace set to 0
12/10/2010	2:21:53 PM	Helium valve closed
12/10/2010	2:21:53 PM	H2 valve closed
12/10/2010	2:21:53 PM	BCl3 valve closed
12/10/2010	2:21:53 PM	PH3 valve closed
12/10/2010	2:21:53 PM	SiCl4 pre valve closed
12/10/2010	2:21:53 PM	SiCl4 post valve closed
12/10/2010	2:21:53 PM	Bubbler valve closed
12/10/2010	2:21:53 PM	Main Vac valve opened
12/10/2010	2:21:53 PM	Bypass valve opened
12/10/2010	2:21:53 PM	Helium MFC set to  0.000000
12/10/2010	2:21:53 PM	H2 MFC set to  0.000000
12/10/2010	2:21:53 PM	BCl3 MFC set to  0.000000
12/10/2010	2:21:53 PM	PHl3 MFC set to  0.000000
12/10/2010	2:21:53 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:21:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:21:53 PM	Tube furnace set to 0
12/10/2010	2:22:53 PM	H2 valve closed
12/10/2010	2:22:53 PM	BCl3 valve closed
12/10/2010	2:22:53 PM	PH3 valve closed
12/10/2010	2:22:53 PM	SiCl4 pre valve closed
12/10/2010	2:22:53 PM	SiCl4 post valve closed
12/10/2010	2:22:53 PM	Bubbler valve closed
12/10/2010	2:22:53 PM	Helium valve opened
12/10/2010	2:22:53 PM	Main Vac valve opened
12/10/2010	2:22:53 PM	Bypass valve opened
12/10/2010	2:22:53 PM	Helium MFC set to  100.000000
12/10/2010	2:22:53 PM	H2 MFC set to  0.000000
12/10/2010	2:22:53 PM	BCl3 MFC set to  0.000000
12/10/2010	2:22:53 PM	PHl3 MFC set to  0.000000
12/10/2010	2:22:53 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:22:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:22:53 PM	Tube furnace set to 0
12/10/2010	2:23:53 PM	Helium valve closed
12/10/2010	2:23:53 PM	H2 valve closed
12/10/2010	2:23:53 PM	BCl3 valve closed
12/10/2010	2:23:53 PM	PH3 valve closed
12/10/2010	2:23:53 PM	SiCl4 pre valve closed
12/10/2010	2:23:53 PM	SiCl4 post valve closed
12/10/2010	2:23:53 PM	Bubbler valve closed
12/10/2010	2:23:53 PM	Main Vac valve opened
12/10/2010	2:23:53 PM	Bypass valve opened
12/10/2010	2:23:53 PM	Helium MFC set to  0.000000
12/10/2010	2:23:53 PM	H2 MFC set to  0.000000
12/10/2010	2:23:53 PM	BCl3 MFC set to  0.000000
12/10/2010	2:23:53 PM	PHl3 MFC set to  0.000000
12/10/2010	2:23:53 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:23:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:23:53 PM	Tube furnace set to 0
12/10/2010	2:24:53 PM	H2 valve closed
12/10/2010	2:24:53 PM	BCl3 valve closed
12/10/2010	2:24:53 PM	PH3 valve closed
12/10/2010	2:24:53 PM	SiCl4 pre valve closed
12/10/2010	2:24:53 PM	SiCl4 post valve closed
12/10/2010	2:24:53 PM	Bubbler valve closed
12/10/2010	2:24:53 PM	Helium valve opened
12/10/2010	2:24:53 PM	Main Vac valve opened
12/10/2010	2:24:53 PM	Bypass valve opened
12/10/2010	2:24:53 PM	Helium MFC set to  100.000000
12/10/2010	2:24:53 PM	H2 MFC set to  0.000000
12/10/2010	2:24:53 PM	BCl3 MFC set to  0.000000
12/10/2010	2:24:53 PM	PHl3 MFC set to  0.000000
12/10/2010	2:24:53 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:24:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:24:53 PM	Tube furnace set to 0
12/10/2010	2:25:53 PM	Helium valve closed
12/10/2010	2:25:53 PM	H2 valve closed
12/10/2010	2:25:53 PM	BCl3 valve closed
12/10/2010	2:25:53 PM	PH3 valve closed
12/10/2010	2:25:53 PM	SiCl4 pre valve closed
12/10/2010	2:25:53 PM	SiCl4 post valve closed
12/10/2010	2:25:53 PM	Bubbler valve closed
12/10/2010	2:25:53 PM	Main Vac valve opened
12/10/2010	2:25:53 PM	Bypass valve opened
12/10/2010	2:25:53 PM	Helium MFC set to  0.000000
12/10/2010	2:25:53 PM	H2 MFC set to  0.000000
12/10/2010	2:25:53 PM	BCl3 MFC set to  0.000000
12/10/2010	2:25:53 PM	PHl3 MFC set to  0.000000
12/10/2010	2:25:53 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:25:53 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:25:54 PM	Tube furnace set to 0
12/10/2010	2:26:54 PM	H2 valve closed
12/10/2010	2:26:54 PM	BCl3 valve closed
12/10/2010	2:26:54 PM	PH3 valve closed
12/10/2010	2:26:54 PM	SiCl4 pre valve closed
12/10/2010	2:26:54 PM	SiCl4 post valve closed
12/10/2010	2:26:54 PM	Bubbler valve closed
12/10/2010	2:26:54 PM	Helium valve opened
12/10/2010	2:26:54 PM	Main Vac valve opened
12/10/2010	2:26:54 PM	Bypass valve opened
12/10/2010	2:26:54 PM	Helium MFC set to  100.000000
12/10/2010	2:26:54 PM	H2 MFC set to  0.000000
12/10/2010	2:26:54 PM	BCl3 MFC set to  0.000000
12/10/2010	2:26:54 PM	PHl3 MFC set to  0.000000
12/10/2010	2:26:54 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:26:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:26:54 PM	Tube furnace set to 0
12/10/2010	2:27:54 PM	Helium valve closed
12/10/2010	2:27:54 PM	H2 valve closed
12/10/2010	2:27:54 PM	BCl3 valve closed
12/10/2010	2:27:54 PM	PH3 valve closed
12/10/2010	2:27:54 PM	SiCl4 pre valve closed
12/10/2010	2:27:54 PM	SiCl4 post valve closed
12/10/2010	2:27:54 PM	Bubbler valve closed
12/10/2010	2:27:54 PM	Main Vac valve opened
12/10/2010	2:27:54 PM	Bypass valve opened
12/10/2010	2:27:54 PM	Helium MFC set to  0.000000
12/10/2010	2:27:54 PM	H2 MFC set to  0.000000
12/10/2010	2:27:54 PM	BCl3 MFC set to  0.000000
12/10/2010	2:27:54 PM	PHl3 MFC set to  0.000000
12/10/2010	2:27:54 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:27:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:27:54 PM	Tube furnace set to 0
12/10/2010	2:28:54 PM	H2 valve closed
12/10/2010	2:28:54 PM	BCl3 valve closed
12/10/2010	2:28:54 PM	PH3 valve closed
12/10/2010	2:28:54 PM	SiCl4 pre valve closed
12/10/2010	2:28:54 PM	SiCl4 post valve closed
12/10/2010	2:28:54 PM	Bubbler valve closed
12/10/2010	2:28:54 PM	Helium valve opened
12/10/2010	2:28:54 PM	Main Vac valve opened
12/10/2010	2:28:54 PM	Bypass valve opened
12/10/2010	2:28:54 PM	Helium MFC set to  100.000000
12/10/2010	2:28:54 PM	H2 MFC set to  0.000000
12/10/2010	2:28:54 PM	BCl3 MFC set to  0.000000
12/10/2010	2:28:54 PM	PHl3 MFC set to  0.000000
12/10/2010	2:28:54 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:28:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:28:54 PM	Tube furnace set to 0
12/10/2010	2:29:54 PM	Helium valve closed
12/10/2010	2:29:54 PM	H2 valve closed
12/10/2010	2:29:54 PM	BCl3 valve closed
12/10/2010	2:29:54 PM	PH3 valve closed
12/10/2010	2:29:54 PM	SiCl4 pre valve closed
12/10/2010	2:29:54 PM	SiCl4 post valve closed
12/10/2010	2:29:54 PM	Bubbler valve closed
12/10/2010	2:29:54 PM	Main Vac valve opened
12/10/2010	2:29:54 PM	Bypass valve opened
12/10/2010	2:29:54 PM	Helium MFC set to  0.000000
12/10/2010	2:29:54 PM	H2 MFC set to  0.000000
12/10/2010	2:29:54 PM	BCl3 MFC set to  0.000000
12/10/2010	2:29:54 PM	PHl3 MFC set to  0.000000
12/10/2010	2:29:54 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:29:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:29:54 PM	Tube furnace set to 0
12/10/2010	2:30:54 PM	H2 valve closed
12/10/2010	2:30:54 PM	BCl3 valve closed
12/10/2010	2:30:54 PM	PH3 valve closed
12/10/2010	2:30:54 PM	SiCl4 pre valve closed
12/10/2010	2:30:54 PM	SiCl4 post valve closed
12/10/2010	2:30:54 PM	Bubbler valve closed
12/10/2010	2:30:54 PM	Helium valve opened
12/10/2010	2:30:54 PM	Main Vac valve opened
12/10/2010	2:30:54 PM	Bypass valve opened
12/10/2010	2:30:54 PM	Helium MFC set to  100.000000
12/10/2010	2:30:54 PM	H2 MFC set to  0.000000
12/10/2010	2:30:54 PM	BCl3 MFC set to  0.000000
12/10/2010	2:30:54 PM	PHl3 MFC set to  0.000000
12/10/2010	2:30:54 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:30:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:30:55 PM	Tube furnace set to 0
12/10/2010	2:31:55 PM	Helium valve closed
12/10/2010	2:31:55 PM	H2 valve closed
12/10/2010	2:31:55 PM	BCl3 valve closed
12/10/2010	2:31:55 PM	PH3 valve closed
12/10/2010	2:31:55 PM	SiCl4 pre valve closed
12/10/2010	2:31:55 PM	SiCl4 post valve closed
12/10/2010	2:31:55 PM	Bubbler valve closed
12/10/2010	2:31:55 PM	Main Vac valve opened
12/10/2010	2:31:55 PM	Bypass valve opened
12/10/2010	2:31:55 PM	Helium MFC set to  0.000000
12/10/2010	2:31:55 PM	H2 MFC set to  0.000000
12/10/2010	2:31:55 PM	BCl3 MFC set to  0.000000
12/10/2010	2:31:55 PM	PHl3 MFC set to  0.000000
12/10/2010	2:31:55 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:31:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:31:55 PM	Tube furnace set to 0
12/10/2010	2:32:55 PM	H2 valve closed
12/10/2010	2:32:55 PM	BCl3 valve closed
12/10/2010	2:32:55 PM	PH3 valve closed
12/10/2010	2:32:55 PM	SiCl4 pre valve closed
12/10/2010	2:32:55 PM	SiCl4 post valve closed
12/10/2010	2:32:55 PM	Bubbler valve closed
12/10/2010	2:32:55 PM	Helium valve opened
12/10/2010	2:32:55 PM	Main Vac valve opened
12/10/2010	2:32:55 PM	Bypass valve opened
12/10/2010	2:32:55 PM	Helium MFC set to  100.000000
12/10/2010	2:32:55 PM	H2 MFC set to  0.000000
12/10/2010	2:32:55 PM	BCl3 MFC set to  0.000000
12/10/2010	2:32:55 PM	PHl3 MFC set to  0.000000
12/10/2010	2:32:55 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:32:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:32:55 PM	Tube furnace set to 0
12/10/2010	2:33:55 PM	Helium valve closed
12/10/2010	2:33:55 PM	H2 valve closed
12/10/2010	2:33:55 PM	BCl3 valve closed
12/10/2010	2:33:55 PM	PH3 valve closed
12/10/2010	2:33:55 PM	SiCl4 pre valve closed
12/10/2010	2:33:55 PM	SiCl4 post valve closed
12/10/2010	2:33:55 PM	Bubbler valve closed
12/10/2010	2:33:55 PM	Main Vac valve opened
12/10/2010	2:33:55 PM	Bypass valve opened
12/10/2010	2:33:55 PM	Helium MFC set to  0.000000
12/10/2010	2:33:55 PM	H2 MFC set to  0.000000
12/10/2010	2:33:55 PM	BCl3 MFC set to  0.000000
12/10/2010	2:33:55 PM	PHl3 MFC set to  0.000000
12/10/2010	2:33:55 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:33:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:33:55 PM	Tube furnace set to 0
12/10/2010	2:34:55 PM	H2 valve closed
12/10/2010	2:34:55 PM	BCl3 valve closed
12/10/2010	2:34:55 PM	PH3 valve closed
12/10/2010	2:34:55 PM	SiCl4 pre valve closed
12/10/2010	2:34:55 PM	SiCl4 post valve closed
12/10/2010	2:34:55 PM	Bubbler valve closed
12/10/2010	2:34:55 PM	Helium valve opened
12/10/2010	2:34:55 PM	Main Vac valve opened
12/10/2010	2:34:55 PM	Bypass valve opened
12/10/2010	2:34:55 PM	Helium MFC set to  100.000000
12/10/2010	2:34:55 PM	H2 MFC set to  0.000000
12/10/2010	2:34:55 PM	BCl3 MFC set to  0.000000
12/10/2010	2:34:55 PM	PHl3 MFC set to  0.000000
12/10/2010	2:34:55 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:34:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:34:55 PM	Tube furnace set to 0
12/10/2010	2:35:55 PM	Helium valve closed
12/10/2010	2:35:55 PM	H2 valve closed
12/10/2010	2:35:55 PM	BCl3 valve closed
12/10/2010	2:35:55 PM	PH3 valve closed
12/10/2010	2:35:55 PM	SiCl4 pre valve closed
12/10/2010	2:35:55 PM	SiCl4 post valve closed
12/10/2010	2:35:55 PM	Bubbler valve closed
12/10/2010	2:35:55 PM	Main Vac valve opened
12/10/2010	2:35:55 PM	Bypass valve opened
12/10/2010	2:35:55 PM	Helium MFC set to  0.000000
12/10/2010	2:35:55 PM	H2 MFC set to  0.000000
12/10/2010	2:35:55 PM	BCl3 MFC set to  0.000000
12/10/2010	2:35:55 PM	PHl3 MFC set to  0.000000
12/10/2010	2:35:55 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:35:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:35:56 PM	Tube furnace set to 0
12/10/2010	2:35:57 PM	Run finished at 2:35 PM
12/10/2010	2:35:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	2:51:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	2:51:25 PM	Recipe started at 2:51 PM
12/10/2010	2:51:25 PM	Helium valve closed
12/10/2010	2:51:25 PM	H2 valve closed
12/10/2010	2:51:25 PM	BCl3 valve closed
12/10/2010	2:51:25 PM	PH3 valve closed
12/10/2010	2:51:25 PM	SiCl4 pre valve closed
12/10/2010	2:51:25 PM	SiCl4 post valve closed
12/10/2010	2:51:25 PM	Main Vac valve closed
12/10/2010	2:51:25 PM	Bubbler valve closed
12/10/2010	2:51:25 PM	Bypass valve opened
12/10/2010	2:51:25 PM	Helium MFC set to  0.000000
12/10/2010	2:51:25 PM	H2 MFC set to  0.000000
12/10/2010	2:51:26 PM	BCl3 MFC set to  0.000000
12/10/2010	2:51:26 PM	PHl3 MFC set to  0.000000
12/10/2010	2:51:26 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:51:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:51:26 PM	Tube furnace set to 0
12/10/2010	2:51:26 PM	Helium valve closed
12/10/2010	2:51:26 PM	H2 valve closed
12/10/2010	2:51:26 PM	BCl3 valve closed
12/10/2010	2:51:26 PM	PH3 valve closed
12/10/2010	2:51:26 PM	SiCl4 pre valve closed
12/10/2010	2:51:26 PM	SiCl4 post valve closed
12/10/2010	2:51:26 PM	Bubbler valve closed
12/10/2010	2:51:26 PM	Main Vac valve opened
12/10/2010	2:51:26 PM	Bypass valve opened
12/10/2010	2:51:26 PM	Helium MFC set to  0.000000
12/10/2010	2:51:26 PM	H2 MFC set to  0.000000
12/10/2010	2:51:26 PM	BCl3 MFC set to  0.000000
12/10/2010	2:51:26 PM	PHl3 MFC set to  0.000000
12/10/2010	2:51:26 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:51:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:51:26 PM	Tube furnace set to 0
12/10/2010	2:52:26 PM	H2 valve closed
12/10/2010	2:52:26 PM	BCl3 valve closed
12/10/2010	2:52:26 PM	PH3 valve closed
12/10/2010	2:52:26 PM	SiCl4 pre valve closed
12/10/2010	2:52:26 PM	SiCl4 post valve closed
12/10/2010	2:52:26 PM	Bubbler valve closed
12/10/2010	2:52:26 PM	Helium valve opened
12/10/2010	2:52:26 PM	Main Vac valve opened
12/10/2010	2:52:26 PM	Bypass valve opened
12/10/2010	2:52:26 PM	Helium MFC set to  100.000000
12/10/2010	2:52:26 PM	H2 MFC set to  0.000000
12/10/2010	2:52:26 PM	BCl3 MFC set to  0.000000
12/10/2010	2:52:26 PM	PHl3 MFC set to  0.000000
12/10/2010	2:52:26 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:52:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:52:26 PM	Tube furnace set to 0
12/10/2010	2:53:26 PM	Helium valve closed
12/10/2010	2:53:26 PM	H2 valve closed
12/10/2010	2:53:26 PM	BCl3 valve closed
12/10/2010	2:53:26 PM	PH3 valve closed
12/10/2010	2:53:26 PM	SiCl4 pre valve closed
12/10/2010	2:53:26 PM	SiCl4 post valve closed
12/10/2010	2:53:26 PM	Bubbler valve closed
12/10/2010	2:53:26 PM	Main Vac valve opened
12/10/2010	2:53:26 PM	Bypass valve opened
12/10/2010	2:53:26 PM	Helium MFC set to  0.000000
12/10/2010	2:53:26 PM	H2 MFC set to  0.000000
12/10/2010	2:53:26 PM	BCl3 MFC set to  0.000000
12/10/2010	2:53:26 PM	PHl3 MFC set to  0.000000
12/10/2010	2:53:26 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:53:26 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:53:26 PM	Tube furnace set to 0
12/10/2010	2:54:27 PM	H2 valve closed
12/10/2010	2:54:27 PM	BCl3 valve closed
12/10/2010	2:54:27 PM	PH3 valve closed
12/10/2010	2:54:27 PM	SiCl4 pre valve closed
12/10/2010	2:54:27 PM	SiCl4 post valve closed
12/10/2010	2:54:27 PM	Bubbler valve closed
12/10/2010	2:54:27 PM	Helium valve opened
12/10/2010	2:54:27 PM	Main Vac valve opened
12/10/2010	2:54:27 PM	Bypass valve opened
12/10/2010	2:54:27 PM	Helium MFC set to  100.000000
12/10/2010	2:54:27 PM	H2 MFC set to  0.000000
12/10/2010	2:54:27 PM	BCl3 MFC set to  0.000000
12/10/2010	2:54:27 PM	PHl3 MFC set to  0.000000
12/10/2010	2:54:27 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:54:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:54:27 PM	Tube furnace set to 0
12/10/2010	2:55:27 PM	Helium valve closed
12/10/2010	2:55:27 PM	H2 valve closed
12/10/2010	2:55:27 PM	BCl3 valve closed
12/10/2010	2:55:27 PM	PH3 valve closed
12/10/2010	2:55:27 PM	SiCl4 pre valve closed
12/10/2010	2:55:27 PM	SiCl4 post valve closed
12/10/2010	2:55:27 PM	Bubbler valve closed
12/10/2010	2:55:27 PM	Main Vac valve opened
12/10/2010	2:55:27 PM	Bypass valve opened
12/10/2010	2:55:27 PM	Helium MFC set to  0.000000
12/10/2010	2:55:27 PM	H2 MFC set to  0.000000
12/10/2010	2:55:27 PM	BCl3 MFC set to  0.000000
12/10/2010	2:55:27 PM	PHl3 MFC set to  0.000000
12/10/2010	2:55:27 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:55:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:55:27 PM	Tube furnace set to 0
12/10/2010	2:56:27 PM	H2 valve closed
12/10/2010	2:56:27 PM	BCl3 valve closed
12/10/2010	2:56:27 PM	PH3 valve closed
12/10/2010	2:56:27 PM	SiCl4 pre valve closed
12/10/2010	2:56:27 PM	SiCl4 post valve closed
12/10/2010	2:56:27 PM	Bubbler valve closed
12/10/2010	2:56:27 PM	Helium valve opened
12/10/2010	2:56:27 PM	Main Vac valve opened
12/10/2010	2:56:27 PM	Bypass valve opened
12/10/2010	2:56:27 PM	Helium MFC set to  100.000000
12/10/2010	2:56:27 PM	H2 MFC set to  0.000000
12/10/2010	2:56:27 PM	BCl3 MFC set to  0.000000
12/10/2010	2:56:27 PM	PHl3 MFC set to  0.000000
12/10/2010	2:56:27 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:56:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:56:27 PM	Tube furnace set to 0
12/10/2010	2:57:27 PM	Helium valve closed
12/10/2010	2:57:27 PM	H2 valve closed
12/10/2010	2:57:27 PM	BCl3 valve closed
12/10/2010	2:57:27 PM	PH3 valve closed
12/10/2010	2:57:27 PM	SiCl4 pre valve closed
12/10/2010	2:57:27 PM	SiCl4 post valve closed
12/10/2010	2:57:27 PM	Bubbler valve closed
12/10/2010	2:57:27 PM	Main Vac valve opened
12/10/2010	2:57:27 PM	Bypass valve opened
12/10/2010	2:57:27 PM	Helium MFC set to  0.000000
12/10/2010	2:57:27 PM	H2 MFC set to  0.000000
12/10/2010	2:57:27 PM	BCl3 MFC set to  0.000000
12/10/2010	2:57:27 PM	PHl3 MFC set to  0.000000
12/10/2010	2:57:27 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:57:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:57:27 PM	Tube furnace set to 0
12/10/2010	2:58:27 PM	H2 valve closed
12/10/2010	2:58:27 PM	BCl3 valve closed
12/10/2010	2:58:27 PM	PH3 valve closed
12/10/2010	2:58:27 PM	SiCl4 pre valve closed
12/10/2010	2:58:27 PM	SiCl4 post valve closed
12/10/2010	2:58:27 PM	Bubbler valve closed
12/10/2010	2:58:27 PM	Helium valve opened
12/10/2010	2:58:27 PM	Main Vac valve opened
12/10/2010	2:58:27 PM	Bypass valve opened
12/10/2010	2:58:27 PM	Helium MFC set to  100.000000
12/10/2010	2:58:27 PM	H2 MFC set to  0.000000
12/10/2010	2:58:27 PM	BCl3 MFC set to  0.000000
12/10/2010	2:58:27 PM	PHl3 MFC set to  0.000000
12/10/2010	2:58:27 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:58:27 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:58:27 PM	Tube furnace set to 0
12/10/2010	2:59:28 PM	Helium valve closed
12/10/2010	2:59:28 PM	H2 valve closed
12/10/2010	2:59:28 PM	BCl3 valve closed
12/10/2010	2:59:28 PM	PH3 valve closed
12/10/2010	2:59:28 PM	SiCl4 pre valve closed
12/10/2010	2:59:28 PM	SiCl4 post valve closed
12/10/2010	2:59:28 PM	Bubbler valve closed
12/10/2010	2:59:28 PM	Main Vac valve opened
12/10/2010	2:59:28 PM	Bypass valve opened
12/10/2010	2:59:28 PM	Helium MFC set to  0.000000
12/10/2010	2:59:28 PM	H2 MFC set to  0.000000
12/10/2010	2:59:28 PM	BCl3 MFC set to  0.000000
12/10/2010	2:59:28 PM	PHl3 MFC set to  0.000000
12/10/2010	2:59:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	2:59:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	2:59:28 PM	Tube furnace set to 0
12/10/2010	3:00:28 PM	H2 valve closed
12/10/2010	3:00:28 PM	BCl3 valve closed
12/10/2010	3:00:28 PM	PH3 valve closed
12/10/2010	3:00:28 PM	SiCl4 pre valve closed
12/10/2010	3:00:28 PM	SiCl4 post valve closed
12/10/2010	3:00:28 PM	Bubbler valve closed
12/10/2010	3:00:28 PM	Helium valve opened
12/10/2010	3:00:28 PM	Main Vac valve opened
12/10/2010	3:00:28 PM	Bypass valve opened
12/10/2010	3:00:28 PM	Helium MFC set to  100.000000
12/10/2010	3:00:28 PM	H2 MFC set to  0.000000
12/10/2010	3:00:28 PM	BCl3 MFC set to  0.000000
12/10/2010	3:00:28 PM	PHl3 MFC set to  0.000000
12/10/2010	3:00:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:00:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:00:28 PM	Tube furnace set to 0
12/10/2010	3:01:28 PM	Helium valve closed
12/10/2010	3:01:28 PM	H2 valve closed
12/10/2010	3:01:28 PM	BCl3 valve closed
12/10/2010	3:01:28 PM	PH3 valve closed
12/10/2010	3:01:28 PM	SiCl4 pre valve closed
12/10/2010	3:01:28 PM	SiCl4 post valve closed
12/10/2010	3:01:28 PM	Bubbler valve closed
12/10/2010	3:01:28 PM	Main Vac valve opened
12/10/2010	3:01:28 PM	Bypass valve opened
12/10/2010	3:01:28 PM	Helium MFC set to  0.000000
12/10/2010	3:01:28 PM	H2 MFC set to  0.000000
12/10/2010	3:01:28 PM	BCl3 MFC set to  0.000000
12/10/2010	3:01:28 PM	PHl3 MFC set to  0.000000
12/10/2010	3:01:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:01:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:01:28 PM	Tube furnace set to 0
12/10/2010	3:02:28 PM	H2 valve closed
12/10/2010	3:02:28 PM	BCl3 valve closed
12/10/2010	3:02:28 PM	PH3 valve closed
12/10/2010	3:02:28 PM	SiCl4 pre valve closed
12/10/2010	3:02:28 PM	SiCl4 post valve closed
12/10/2010	3:02:28 PM	Bubbler valve closed
12/10/2010	3:02:28 PM	Helium valve opened
12/10/2010	3:02:28 PM	Main Vac valve opened
12/10/2010	3:02:28 PM	Bypass valve opened
12/10/2010	3:02:28 PM	Helium MFC set to  100.000000
12/10/2010	3:02:28 PM	H2 MFC set to  0.000000
12/10/2010	3:02:28 PM	BCl3 MFC set to  0.000000
12/10/2010	3:02:28 PM	PHl3 MFC set to  0.000000
12/10/2010	3:02:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:02:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:02:28 PM	Tube furnace set to 0
12/10/2010	3:03:28 PM	Helium valve closed
12/10/2010	3:03:28 PM	H2 valve closed
12/10/2010	3:03:28 PM	BCl3 valve closed
12/10/2010	3:03:28 PM	PH3 valve closed
12/10/2010	3:03:28 PM	SiCl4 pre valve closed
12/10/2010	3:03:28 PM	SiCl4 post valve closed
12/10/2010	3:03:28 PM	Bubbler valve closed
12/10/2010	3:03:28 PM	Main Vac valve opened
12/10/2010	3:03:28 PM	Bypass valve opened
12/10/2010	3:03:28 PM	Helium MFC set to  0.000000
12/10/2010	3:03:28 PM	H2 MFC set to  0.000000
12/10/2010	3:03:28 PM	BCl3 MFC set to  0.000000
12/10/2010	3:03:28 PM	PHl3 MFC set to  0.000000
12/10/2010	3:03:28 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:03:28 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:03:28 PM	Tube furnace set to 0
12/10/2010	3:04:29 PM	H2 valve closed
12/10/2010	3:04:29 PM	BCl3 valve closed
12/10/2010	3:04:29 PM	PH3 valve closed
12/10/2010	3:04:29 PM	SiCl4 pre valve closed
12/10/2010	3:04:29 PM	SiCl4 post valve closed
12/10/2010	3:04:29 PM	Bubbler valve closed
12/10/2010	3:04:29 PM	Helium valve opened
12/10/2010	3:04:29 PM	Main Vac valve opened
12/10/2010	3:04:29 PM	Bypass valve opened
12/10/2010	3:04:29 PM	Helium MFC set to  100.000000
12/10/2010	3:04:29 PM	H2 MFC set to  0.000000
12/10/2010	3:04:29 PM	BCl3 MFC set to  0.000000
12/10/2010	3:04:29 PM	PHl3 MFC set to  0.000000
12/10/2010	3:04:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:04:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:04:29 PM	Tube furnace set to 0
12/10/2010	3:05:29 PM	Helium valve closed
12/10/2010	3:05:29 PM	H2 valve closed
12/10/2010	3:05:29 PM	BCl3 valve closed
12/10/2010	3:05:29 PM	PH3 valve closed
12/10/2010	3:05:29 PM	SiCl4 pre valve closed
12/10/2010	3:05:29 PM	SiCl4 post valve closed
12/10/2010	3:05:29 PM	Bubbler valve closed
12/10/2010	3:05:29 PM	Main Vac valve opened
12/10/2010	3:05:29 PM	Bypass valve opened
12/10/2010	3:05:29 PM	Helium MFC set to  0.000000
12/10/2010	3:05:29 PM	H2 MFC set to  0.000000
12/10/2010	3:05:29 PM	BCl3 MFC set to  0.000000
12/10/2010	3:05:29 PM	PHl3 MFC set to  0.000000
12/10/2010	3:05:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:05:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:05:29 PM	Tube furnace set to 0
12/10/2010	3:06:29 PM	H2 valve closed
12/10/2010	3:06:29 PM	BCl3 valve closed
12/10/2010	3:06:29 PM	PH3 valve closed
12/10/2010	3:06:29 PM	SiCl4 pre valve closed
12/10/2010	3:06:29 PM	SiCl4 post valve closed
12/10/2010	3:06:29 PM	Bubbler valve closed
12/10/2010	3:06:29 PM	Helium valve opened
12/10/2010	3:06:29 PM	Main Vac valve opened
12/10/2010	3:06:29 PM	Bypass valve opened
12/10/2010	3:06:29 PM	Helium MFC set to  100.000000
12/10/2010	3:06:29 PM	H2 MFC set to  0.000000
12/10/2010	3:06:29 PM	BCl3 MFC set to  0.000000
12/10/2010	3:06:29 PM	PHl3 MFC set to  0.000000
12/10/2010	3:06:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:06:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:06:29 PM	Tube furnace set to 0
12/10/2010	3:07:29 PM	Helium valve closed
12/10/2010	3:07:29 PM	H2 valve closed
12/10/2010	3:07:29 PM	BCl3 valve closed
12/10/2010	3:07:29 PM	PH3 valve closed
12/10/2010	3:07:29 PM	SiCl4 pre valve closed
12/10/2010	3:07:29 PM	SiCl4 post valve closed
12/10/2010	3:07:29 PM	Bubbler valve closed
12/10/2010	3:07:29 PM	Main Vac valve opened
12/10/2010	3:07:29 PM	Bypass valve opened
12/10/2010	3:07:29 PM	Helium MFC set to  0.000000
12/10/2010	3:07:29 PM	H2 MFC set to  0.000000
12/10/2010	3:07:29 PM	BCl3 MFC set to  0.000000
12/10/2010	3:07:29 PM	PHl3 MFC set to  0.000000
12/10/2010	3:07:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:07:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:07:29 PM	Tube furnace set to 0
12/10/2010	3:08:29 PM	H2 valve closed
12/10/2010	3:08:29 PM	BCl3 valve closed
12/10/2010	3:08:29 PM	PH3 valve closed
12/10/2010	3:08:29 PM	SiCl4 pre valve closed
12/10/2010	3:08:29 PM	SiCl4 post valve closed
12/10/2010	3:08:29 PM	Bubbler valve closed
12/10/2010	3:08:29 PM	Helium valve opened
12/10/2010	3:08:29 PM	Main Vac valve opened
12/10/2010	3:08:29 PM	Bypass valve opened
12/10/2010	3:08:29 PM	Helium MFC set to  100.000000
12/10/2010	3:08:29 PM	H2 MFC set to  0.000000
12/10/2010	3:08:29 PM	BCl3 MFC set to  0.000000
12/10/2010	3:08:29 PM	PHl3 MFC set to  0.000000
12/10/2010	3:08:29 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:08:29 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:08:29 PM	Tube furnace set to 0
12/10/2010	3:09:29 PM	Helium valve closed
12/10/2010	3:09:29 PM	H2 valve closed
12/10/2010	3:09:29 PM	BCl3 valve closed
12/10/2010	3:09:29 PM	PH3 valve closed
12/10/2010	3:09:29 PM	SiCl4 pre valve closed
12/10/2010	3:09:29 PM	SiCl4 post valve closed
12/10/2010	3:09:29 PM	Bubbler valve closed
12/10/2010	3:09:29 PM	Main Vac valve opened
12/10/2010	3:09:29 PM	Bypass valve opened
12/10/2010	3:09:30 PM	Helium MFC set to  0.000000
12/10/2010	3:09:30 PM	H2 MFC set to  0.000000
12/10/2010	3:09:30 PM	BCl3 MFC set to  0.000000
12/10/2010	3:09:30 PM	PHl3 MFC set to  0.000000
12/10/2010	3:09:30 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:09:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:09:30 PM	Tube furnace set to 0
12/10/2010	3:10:30 PM	H2 valve closed
12/10/2010	3:10:30 PM	BCl3 valve closed
12/10/2010	3:10:30 PM	PH3 valve closed
12/10/2010	3:10:30 PM	SiCl4 pre valve closed
12/10/2010	3:10:30 PM	SiCl4 post valve closed
12/10/2010	3:10:30 PM	Bubbler valve closed
12/10/2010	3:10:30 PM	Helium valve opened
12/10/2010	3:10:30 PM	Main Vac valve opened
12/10/2010	3:10:30 PM	Bypass valve opened
12/10/2010	3:10:30 PM	Helium MFC set to  100.000000
12/10/2010	3:10:30 PM	H2 MFC set to  0.000000
12/10/2010	3:10:30 PM	BCl3 MFC set to  0.000000
12/10/2010	3:10:30 PM	PHl3 MFC set to  0.000000
12/10/2010	3:10:30 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:10:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:10:30 PM	Tube furnace set to 0
12/10/2010	3:11:30 PM	Helium valve closed
12/10/2010	3:11:30 PM	H2 valve closed
12/10/2010	3:11:30 PM	BCl3 valve closed
12/10/2010	3:11:30 PM	PH3 valve closed
12/10/2010	3:11:30 PM	SiCl4 pre valve closed
12/10/2010	3:11:30 PM	SiCl4 post valve closed
12/10/2010	3:11:30 PM	Bubbler valve closed
12/10/2010	3:11:30 PM	Main Vac valve opened
12/10/2010	3:11:30 PM	Bypass valve opened
12/10/2010	3:11:30 PM	Helium MFC set to  0.000000
12/10/2010	3:11:30 PM	H2 MFC set to  0.000000
12/10/2010	3:11:30 PM	BCl3 MFC set to  0.000000
12/10/2010	3:11:30 PM	PHl3 MFC set to  0.000000
12/10/2010	3:11:30 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:11:30 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:11:30 PM	Tube furnace set to 0
12/10/2010	3:11:31 PM	Run finished at 3:11 PM
12/10/2010	3:11:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	3:14:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	3:14:57 PM	Recipe started at 3:14 PM
12/10/2010	3:14:57 PM	Helium valve closed
12/10/2010	3:14:57 PM	H2 valve closed
12/10/2010	3:14:57 PM	BCl3 valve closed
12/10/2010	3:14:57 PM	PH3 valve closed
12/10/2010	3:14:57 PM	SiCl4 pre valve closed
12/10/2010	3:14:57 PM	SiCl4 post valve closed
12/10/2010	3:14:57 PM	Main Vac valve closed
12/10/2010	3:14:57 PM	Bubbler valve closed
12/10/2010	3:14:57 PM	Bypass valve opened
12/10/2010	3:14:57 PM	Helium MFC set to  0.000000
12/10/2010	3:14:57 PM	H2 MFC set to  0.000000
12/10/2010	3:14:57 PM	BCl3 MFC set to  0.000000
12/10/2010	3:14:57 PM	PHl3 MFC set to  0.000000
12/10/2010	3:14:57 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:14:57 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:14:58 PM	Tube furnace set to 0
12/10/2010	3:14:58 PM	Helium valve closed
12/10/2010	3:14:58 PM	H2 valve closed
12/10/2010	3:14:58 PM	BCl3 valve closed
12/10/2010	3:14:58 PM	PH3 valve closed
12/10/2010	3:14:58 PM	SiCl4 pre valve closed
12/10/2010	3:14:58 PM	SiCl4 post valve closed
12/10/2010	3:14:58 PM	Bubbler valve closed
12/10/2010	3:14:58 PM	Main Vac valve opened
12/10/2010	3:14:58 PM	Bypass valve opened
12/10/2010	3:14:58 PM	Helium MFC set to  0.000000
12/10/2010	3:14:58 PM	H2 MFC set to  0.000000
12/10/2010	3:14:58 PM	BCl3 MFC set to  0.000000
12/10/2010	3:14:58 PM	PHl3 MFC set to  0.000000
12/10/2010	3:14:58 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:14:58 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:14:58 PM	Tube furnace set to 0
12/10/2010	3:15:58 PM	H2 valve closed
12/10/2010	3:15:58 PM	BCl3 valve closed
12/10/2010	3:15:58 PM	PH3 valve closed
12/10/2010	3:15:58 PM	SiCl4 pre valve closed
12/10/2010	3:15:58 PM	SiCl4 post valve closed
12/10/2010	3:15:58 PM	Bubbler valve closed
12/10/2010	3:15:58 PM	Helium valve opened
12/10/2010	3:15:58 PM	Main Vac valve opened
12/10/2010	3:15:58 PM	Bypass valve opened
12/10/2010	3:15:58 PM	Helium MFC set to  100.000000
12/10/2010	3:15:58 PM	H2 MFC set to  0.000000
12/10/2010	3:15:58 PM	BCl3 MFC set to  0.000000
12/10/2010	3:15:58 PM	PHl3 MFC set to  0.000000
12/10/2010	3:15:58 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:15:58 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:15:58 PM	Tube furnace set to 0
12/10/2010	3:16:58 PM	Helium valve closed
12/10/2010	3:16:58 PM	H2 valve closed
12/10/2010	3:16:58 PM	BCl3 valve closed
12/10/2010	3:16:58 PM	PH3 valve closed
12/10/2010	3:16:58 PM	SiCl4 pre valve closed
12/10/2010	3:16:58 PM	SiCl4 post valve closed
12/10/2010	3:16:58 PM	Bubbler valve closed
12/10/2010	3:16:58 PM	Main Vac valve opened
12/10/2010	3:16:58 PM	Bypass valve opened
12/10/2010	3:16:58 PM	Helium MFC set to  0.000000
12/10/2010	3:16:58 PM	H2 MFC set to  0.000000
12/10/2010	3:16:58 PM	BCl3 MFC set to  0.000000
12/10/2010	3:16:58 PM	PHl3 MFC set to  0.000000
12/10/2010	3:16:58 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:16:58 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:16:58 PM	Tube furnace set to 0
12/10/2010	3:17:58 PM	H2 valve closed
12/10/2010	3:17:58 PM	BCl3 valve closed
12/10/2010	3:17:58 PM	PH3 valve closed
12/10/2010	3:17:58 PM	SiCl4 pre valve closed
12/10/2010	3:17:58 PM	SiCl4 post valve closed
12/10/2010	3:17:58 PM	Bubbler valve closed
12/10/2010	3:17:58 PM	Helium valve opened
12/10/2010	3:17:58 PM	Main Vac valve opened
12/10/2010	3:17:58 PM	Bypass valve opened
12/10/2010	3:17:58 PM	Helium MFC set to  100.000000
12/10/2010	3:17:58 PM	H2 MFC set to  0.000000
12/10/2010	3:17:58 PM	BCl3 MFC set to  0.000000
12/10/2010	3:17:58 PM	PHl3 MFC set to  0.000000
12/10/2010	3:17:58 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:17:58 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:17:59 PM	Tube furnace set to 0
12/10/2010	3:18:59 PM	Helium valve closed
12/10/2010	3:18:59 PM	H2 valve closed
12/10/2010	3:18:59 PM	BCl3 valve closed
12/10/2010	3:18:59 PM	PH3 valve closed
12/10/2010	3:18:59 PM	SiCl4 pre valve closed
12/10/2010	3:18:59 PM	SiCl4 post valve closed
12/10/2010	3:18:59 PM	Bubbler valve closed
12/10/2010	3:18:59 PM	Main Vac valve opened
12/10/2010	3:18:59 PM	Bypass valve opened
12/10/2010	3:18:59 PM	Helium MFC set to  0.000000
12/10/2010	3:18:59 PM	H2 MFC set to  0.000000
12/10/2010	3:18:59 PM	BCl3 MFC set to  0.000000
12/10/2010	3:18:59 PM	PHl3 MFC set to  0.000000
12/10/2010	3:18:59 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:18:59 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:18:59 PM	Tube furnace set to 0
12/10/2010	3:19:59 PM	H2 valve closed
12/10/2010	3:19:59 PM	BCl3 valve closed
12/10/2010	3:19:59 PM	PH3 valve closed
12/10/2010	3:19:59 PM	SiCl4 pre valve closed
12/10/2010	3:19:59 PM	SiCl4 post valve closed
12/10/2010	3:19:59 PM	Bubbler valve closed
12/10/2010	3:19:59 PM	Helium valve opened
12/10/2010	3:19:59 PM	Main Vac valve opened
12/10/2010	3:19:59 PM	Bypass valve opened
12/10/2010	3:19:59 PM	Helium MFC set to  100.000000
12/10/2010	3:19:59 PM	H2 MFC set to  0.000000
12/10/2010	3:19:59 PM	BCl3 MFC set to  0.000000
12/10/2010	3:19:59 PM	PHl3 MFC set to  0.000000
12/10/2010	3:19:59 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:19:59 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:19:59 PM	Tube furnace set to 0
12/10/2010	3:20:59 PM	Helium valve closed
12/10/2010	3:20:59 PM	H2 valve closed
12/10/2010	3:20:59 PM	BCl3 valve closed
12/10/2010	3:20:59 PM	PH3 valve closed
12/10/2010	3:20:59 PM	SiCl4 pre valve closed
12/10/2010	3:20:59 PM	SiCl4 post valve closed
12/10/2010	3:20:59 PM	Bubbler valve closed
12/10/2010	3:20:59 PM	Main Vac valve opened
12/10/2010	3:20:59 PM	Bypass valve opened
12/10/2010	3:20:59 PM	Helium MFC set to  0.000000
12/10/2010	3:20:59 PM	H2 MFC set to  0.000000
12/10/2010	3:20:59 PM	BCl3 MFC set to  0.000000
12/10/2010	3:20:59 PM	PHl3 MFC set to  0.000000
12/10/2010	3:20:59 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:20:59 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:20:59 PM	Tube furnace set to 0
12/10/2010	3:21:59 PM	H2 valve closed
12/10/2010	3:21:59 PM	BCl3 valve closed
12/10/2010	3:21:59 PM	PH3 valve closed
12/10/2010	3:21:59 PM	SiCl4 pre valve closed
12/10/2010	3:21:59 PM	SiCl4 post valve closed
12/10/2010	3:21:59 PM	Bubbler valve closed
12/10/2010	3:21:59 PM	Helium valve opened
12/10/2010	3:21:59 PM	Main Vac valve opened
12/10/2010	3:21:59 PM	Bypass valve opened
12/10/2010	3:21:59 PM	Helium MFC set to  100.000000
12/10/2010	3:21:59 PM	H2 MFC set to  0.000000
12/10/2010	3:21:59 PM	BCl3 MFC set to  0.000000
12/10/2010	3:21:59 PM	PHl3 MFC set to  0.000000
12/10/2010	3:21:59 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:21:59 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:21:59 PM	Tube furnace set to 0
12/10/2010	3:22:59 PM	Helium valve closed
12/10/2010	3:22:59 PM	H2 valve closed
12/10/2010	3:22:59 PM	BCl3 valve closed
12/10/2010	3:22:59 PM	PH3 valve closed
12/10/2010	3:22:59 PM	SiCl4 pre valve closed
12/10/2010	3:22:59 PM	SiCl4 post valve closed
12/10/2010	3:22:59 PM	Bubbler valve closed
12/10/2010	3:22:59 PM	Main Vac valve opened
12/10/2010	3:22:59 PM	Bypass valve opened
12/10/2010	3:22:59 PM	Helium MFC set to  0.000000
12/10/2010	3:22:59 PM	H2 MFC set to  0.000000
12/10/2010	3:22:59 PM	BCl3 MFC set to  0.000000
12/10/2010	3:22:59 PM	PHl3 MFC set to  0.000000
12/10/2010	3:22:59 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:22:59 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:23:00 PM	Tube furnace set to 0
12/10/2010	3:24:00 PM	H2 valve closed
12/10/2010	3:24:00 PM	BCl3 valve closed
12/10/2010	3:24:00 PM	PH3 valve closed
12/10/2010	3:24:00 PM	SiCl4 pre valve closed
12/10/2010	3:24:00 PM	SiCl4 post valve closed
12/10/2010	3:24:00 PM	Bubbler valve closed
12/10/2010	3:24:00 PM	Helium valve opened
12/10/2010	3:24:00 PM	Main Vac valve opened
12/10/2010	3:24:00 PM	Bypass valve opened
12/10/2010	3:24:00 PM	Helium MFC set to  100.000000
12/10/2010	3:24:00 PM	H2 MFC set to  0.000000
12/10/2010	3:24:00 PM	BCl3 MFC set to  0.000000
12/10/2010	3:24:00 PM	PHl3 MFC set to  0.000000
12/10/2010	3:24:00 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:24:00 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:24:00 PM	Tube furnace set to 0
12/10/2010	3:25:00 PM	Helium valve closed
12/10/2010	3:25:00 PM	H2 valve closed
12/10/2010	3:25:00 PM	BCl3 valve closed
12/10/2010	3:25:00 PM	PH3 valve closed
12/10/2010	3:25:00 PM	SiCl4 pre valve closed
12/10/2010	3:25:00 PM	SiCl4 post valve closed
12/10/2010	3:25:00 PM	Bubbler valve closed
12/10/2010	3:25:00 PM	Main Vac valve opened
12/10/2010	3:25:00 PM	Bypass valve opened
12/10/2010	3:25:00 PM	Helium MFC set to  0.000000
12/10/2010	3:25:00 PM	H2 MFC set to  0.000000
12/10/2010	3:25:00 PM	BCl3 MFC set to  0.000000
12/10/2010	3:25:00 PM	PHl3 MFC set to  0.000000
12/10/2010	3:25:00 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:25:00 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:25:00 PM	Tube furnace set to 0
12/10/2010	3:26:00 PM	H2 valve closed
12/10/2010	3:26:00 PM	BCl3 valve closed
12/10/2010	3:26:00 PM	PH3 valve closed
12/10/2010	3:26:00 PM	SiCl4 pre valve closed
12/10/2010	3:26:00 PM	SiCl4 post valve closed
12/10/2010	3:26:00 PM	Bubbler valve closed
12/10/2010	3:26:00 PM	Helium valve opened
12/10/2010	3:26:00 PM	Main Vac valve opened
12/10/2010	3:26:00 PM	Bypass valve opened
12/10/2010	3:26:00 PM	Helium MFC set to  100.000000
12/10/2010	3:26:00 PM	H2 MFC set to  0.000000
12/10/2010	3:26:00 PM	BCl3 MFC set to  0.000000
12/10/2010	3:26:00 PM	PHl3 MFC set to  0.000000
12/10/2010	3:26:00 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:26:00 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:26:00 PM	Tube furnace set to 0
12/10/2010	3:27:00 PM	Helium valve closed
12/10/2010	3:27:00 PM	H2 valve closed
12/10/2010	3:27:00 PM	BCl3 valve closed
12/10/2010	3:27:00 PM	PH3 valve closed
12/10/2010	3:27:00 PM	SiCl4 pre valve closed
12/10/2010	3:27:00 PM	SiCl4 post valve closed
12/10/2010	3:27:00 PM	Bubbler valve closed
12/10/2010	3:27:00 PM	Main Vac valve opened
12/10/2010	3:27:00 PM	Bypass valve opened
12/10/2010	3:27:00 PM	Helium MFC set to  0.000000
12/10/2010	3:27:00 PM	H2 MFC set to  0.000000
12/10/2010	3:27:00 PM	BCl3 MFC set to  0.000000
12/10/2010	3:27:00 PM	PHl3 MFC set to  0.000000
12/10/2010	3:27:00 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:27:00 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:27:00 PM	Tube furnace set to 0
12/10/2010	3:28:00 PM	H2 valve closed
12/10/2010	3:28:00 PM	BCl3 valve closed
12/10/2010	3:28:00 PM	PH3 valve closed
12/10/2010	3:28:00 PM	SiCl4 pre valve closed
12/10/2010	3:28:00 PM	SiCl4 post valve closed
12/10/2010	3:28:00 PM	Bubbler valve closed
12/10/2010	3:28:00 PM	Helium valve opened
12/10/2010	3:28:00 PM	Main Vac valve opened
12/10/2010	3:28:00 PM	Bypass valve opened
12/10/2010	3:28:00 PM	Helium MFC set to  100.000000
12/10/2010	3:28:00 PM	H2 MFC set to  0.000000
12/10/2010	3:28:00 PM	BCl3 MFC set to  0.000000
12/10/2010	3:28:00 PM	PHl3 MFC set to  0.000000
12/10/2010	3:28:00 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:28:00 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:28:01 PM	Tube furnace set to 0
12/10/2010	3:29:01 PM	Helium valve closed
12/10/2010	3:29:01 PM	H2 valve closed
12/10/2010	3:29:01 PM	BCl3 valve closed
12/10/2010	3:29:01 PM	PH3 valve closed
12/10/2010	3:29:01 PM	SiCl4 pre valve closed
12/10/2010	3:29:01 PM	SiCl4 post valve closed
12/10/2010	3:29:01 PM	Bubbler valve closed
12/10/2010	3:29:01 PM	Main Vac valve opened
12/10/2010	3:29:01 PM	Bypass valve opened
12/10/2010	3:29:01 PM	Helium MFC set to  0.000000
12/10/2010	3:29:01 PM	H2 MFC set to  0.000000
12/10/2010	3:29:01 PM	BCl3 MFC set to  0.000000
12/10/2010	3:29:01 PM	PHl3 MFC set to  0.000000
12/10/2010	3:29:01 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:29:01 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:29:01 PM	Tube furnace set to 0
12/10/2010	3:30:01 PM	H2 valve closed
12/10/2010	3:30:01 PM	BCl3 valve closed
12/10/2010	3:30:01 PM	PH3 valve closed
12/10/2010	3:30:01 PM	SiCl4 pre valve closed
12/10/2010	3:30:01 PM	SiCl4 post valve closed
12/10/2010	3:30:01 PM	Bubbler valve closed
12/10/2010	3:30:01 PM	Helium valve opened
12/10/2010	3:30:01 PM	Main Vac valve opened
12/10/2010	3:30:01 PM	Bypass valve opened
12/10/2010	3:30:01 PM	Helium MFC set to  100.000000
12/10/2010	3:30:01 PM	H2 MFC set to  0.000000
12/10/2010	3:30:01 PM	BCl3 MFC set to  0.000000
12/10/2010	3:30:01 PM	PHl3 MFC set to  0.000000
12/10/2010	3:30:01 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:30:01 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:30:01 PM	Tube furnace set to 0
12/10/2010	3:31:01 PM	Helium valve closed
12/10/2010	3:31:01 PM	H2 valve closed
12/10/2010	3:31:01 PM	BCl3 valve closed
12/10/2010	3:31:01 PM	PH3 valve closed
12/10/2010	3:31:01 PM	SiCl4 pre valve closed
12/10/2010	3:31:01 PM	SiCl4 post valve closed
12/10/2010	3:31:01 PM	Bubbler valve closed
12/10/2010	3:31:01 PM	Main Vac valve opened
12/10/2010	3:31:01 PM	Bypass valve opened
12/10/2010	3:31:01 PM	Helium MFC set to  0.000000
12/10/2010	3:31:01 PM	H2 MFC set to  0.000000
12/10/2010	3:31:01 PM	BCl3 MFC set to  0.000000
12/10/2010	3:31:01 PM	PHl3 MFC set to  0.000000
12/10/2010	3:31:01 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:31:01 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:31:01 PM	Tube furnace set to 0
12/10/2010	3:32:01 PM	H2 valve closed
12/10/2010	3:32:01 PM	BCl3 valve closed
12/10/2010	3:32:01 PM	PH3 valve closed
12/10/2010	3:32:01 PM	SiCl4 pre valve closed
12/10/2010	3:32:01 PM	SiCl4 post valve closed
12/10/2010	3:32:01 PM	Bubbler valve closed
12/10/2010	3:32:01 PM	Helium valve opened
12/10/2010	3:32:01 PM	Main Vac valve opened
12/10/2010	3:32:01 PM	Bypass valve opened
12/10/2010	3:32:01 PM	Helium MFC set to  100.000000
12/10/2010	3:32:01 PM	H2 MFC set to  0.000000
12/10/2010	3:32:01 PM	BCl3 MFC set to  0.000000
12/10/2010	3:32:01 PM	PHl3 MFC set to  0.000000
12/10/2010	3:32:01 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:32:01 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:32:01 PM	Tube furnace set to 0
12/10/2010	3:33:01 PM	Helium valve closed
12/10/2010	3:33:01 PM	H2 valve closed
12/10/2010	3:33:01 PM	BCl3 valve closed
12/10/2010	3:33:01 PM	PH3 valve closed
12/10/2010	3:33:01 PM	SiCl4 pre valve closed
12/10/2010	3:33:01 PM	SiCl4 post valve closed
12/10/2010	3:33:01 PM	Bubbler valve closed
12/10/2010	3:33:01 PM	Main Vac valve opened
12/10/2010	3:33:01 PM	Bypass valve opened
12/10/2010	3:33:01 PM	Helium MFC set to  0.000000
12/10/2010	3:33:01 PM	H2 MFC set to  0.000000
12/10/2010	3:33:01 PM	BCl3 MFC set to  0.000000
12/10/2010	3:33:01 PM	PHl3 MFC set to  0.000000
12/10/2010	3:33:01 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:33:01 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:33:02 PM	Tube furnace set to 0
12/10/2010	3:34:02 PM	H2 valve closed
12/10/2010	3:34:02 PM	BCl3 valve closed
12/10/2010	3:34:02 PM	PH3 valve closed
12/10/2010	3:34:02 PM	SiCl4 pre valve closed
12/10/2010	3:34:02 PM	SiCl4 post valve closed
12/10/2010	3:34:02 PM	Bubbler valve closed
12/10/2010	3:34:02 PM	Helium valve opened
12/10/2010	3:34:02 PM	Main Vac valve opened
12/10/2010	3:34:02 PM	Bypass valve opened
12/10/2010	3:34:02 PM	Helium MFC set to  100.000000
12/10/2010	3:34:02 PM	H2 MFC set to  0.000000
12/10/2010	3:34:02 PM	BCl3 MFC set to  0.000000
12/10/2010	3:34:02 PM	PHl3 MFC set to  0.000000
12/10/2010	3:34:02 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:34:02 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:34:02 PM	Tube furnace set to 0
12/10/2010	3:35:02 PM	Helium valve closed
12/10/2010	3:35:02 PM	H2 valve closed
12/10/2010	3:35:02 PM	BCl3 valve closed
12/10/2010	3:35:02 PM	PH3 valve closed
12/10/2010	3:35:02 PM	SiCl4 pre valve closed
12/10/2010	3:35:02 PM	SiCl4 post valve closed
12/10/2010	3:35:02 PM	Bubbler valve closed
12/10/2010	3:35:02 PM	Main Vac valve opened
12/10/2010	3:35:02 PM	Bypass valve opened
12/10/2010	3:35:02 PM	Helium MFC set to  0.000000
12/10/2010	3:35:02 PM	H2 MFC set to  0.000000
12/10/2010	3:35:02 PM	BCl3 MFC set to  0.000000
12/10/2010	3:35:02 PM	PHl3 MFC set to  0.000000
12/10/2010	3:35:02 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:35:02 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:35:02 PM	Tube furnace set to 0
12/10/2010	3:35:03 PM	Run finished at 3:35 PM
12/10/2010	3:35:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
12/10/2010	3:50:59 PM	Bypass valve closed
12/10/2010	3:50:59 PM	Main Vac valve closed
12/10/2010	3:51:09 PM	Main Vac valve opened
12/10/2010	3:51:10 PM	Bypass valve opened
12/10/2010	3:51:33 PM	Recipe started at 3:51 PM
12/10/2010	3:51:33 PM	Helium valve closed
12/10/2010	3:51:33 PM	BCl3 valve closed
12/10/2010	3:51:33 PM	PH3 valve closed
12/10/2010	3:51:33 PM	SiCl4 pre valve closed
12/10/2010	3:51:33 PM	SiCl4 post valve closed
12/10/2010	3:51:33 PM	Main Vac valve closed
12/10/2010	3:51:33 PM	Bypass valve closed
12/10/2010	3:51:33 PM	Bubbler valve closed
12/10/2010	3:51:33 PM	H2 valve opened
12/10/2010	3:51:33 PM	Helium MFC set to  0.000000
12/10/2010	3:51:33 PM	H2 MFC set to  500.000000
12/10/2010	3:51:33 PM	BCl3 MFC set to  0.000000
12/10/2010	3:51:33 PM	PHl3 MFC set to  0.000000
12/10/2010	3:51:33 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:51:33 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:51:34 PM	Tube furnace set to 0
12/10/2010	3:52:54 PM	Helium valve closed
12/10/2010	3:52:54 PM	BCl3 valve closed
12/10/2010	3:52:54 PM	PH3 valve closed
12/10/2010	3:52:54 PM	SiCl4 pre valve closed
12/10/2010	3:52:54 PM	SiCl4 post valve closed
12/10/2010	3:52:54 PM	Main Vac valve closed
12/10/2010	3:52:54 PM	Bypass valve closed
12/10/2010	3:52:54 PM	H2 valve opened
12/10/2010	3:52:54 PM	Bubbler valve opened
12/10/2010	3:52:54 PM	Helium MFC set to  0.000000
12/10/2010	3:52:54 PM	H2 MFC set to  500.000000
12/10/2010	3:52:54 PM	BCl3 MFC set to  0.000000
12/10/2010	3:52:54 PM	PHl3 MFC set to  0.000000
12/10/2010	3:52:54 PM	SiCl4 MFC set to  0.000000
12/10/2010	3:52:54 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	3:52:55 PM	Tube furnace set to 1000
12/10/2010	4:12:55 PM	Helium valve closed
12/10/2010	4:12:55 PM	BCl3 valve closed
12/10/2010	4:12:55 PM	Main Vac valve closed
12/10/2010	4:12:55 PM	Bypass valve closed
12/10/2010	4:12:55 PM	H2 valve opened
12/10/2010	4:12:55 PM	PH3 valve opened
12/10/2010	4:12:55 PM	SiCl4 pre valve opened
12/10/2010	4:12:55 PM	SiCl4 post valve opened
12/10/2010	4:12:55 PM	Bubbler valve opened
12/10/2010	4:12:55 PM	Helium MFC set to  0.000000
12/10/2010	4:12:55 PM	H2 MFC set to  500.000000
12/10/2010	4:12:55 PM	BCl3 MFC set to  0.000000
12/10/2010	4:12:55 PM	PHl3 MFC set to  1.000000
12/10/2010	4:12:55 PM	SiCl4 MFC set to  50.000000
12/10/2010	4:12:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	4:12:55 PM	Tube furnace set to 1000
12/10/2010	4:42:55 PM	H2 valve closed
12/10/2010	4:42:55 PM	BCl3 valve closed
12/10/2010	4:42:55 PM	PH3 valve closed
12/10/2010	4:42:55 PM	SiCl4 pre valve closed
12/10/2010	4:42:55 PM	SiCl4 post valve closed
12/10/2010	4:42:55 PM	Main Vac valve closed
12/10/2010	4:42:55 PM	Bypass valve closed
12/10/2010	4:42:55 PM	Helium valve opened
12/10/2010	4:42:55 PM	Bubbler valve opened
12/10/2010	4:42:55 PM	Helium MFC set to  500.000000
12/10/2010	4:42:55 PM	H2 MFC set to  0.000000
12/10/2010	4:42:55 PM	BCl3 MFC set to  0.000000
12/10/2010	4:42:55 PM	PHl3 MFC set to  0.000000
12/10/2010	4:42:55 PM	SiCl4 MFC set to  0.000000
12/10/2010	4:42:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	4:42:55 PM	Tube furnace set to 0
12/10/2010	5:02:55 PM	Helium valve closed
12/10/2010	5:02:55 PM	H2 valve closed
12/10/2010	5:02:55 PM	BCl3 valve closed
12/10/2010	5:02:55 PM	PH3 valve closed
12/10/2010	5:02:55 PM	SiCl4 pre valve closed
12/10/2010	5:02:55 PM	SiCl4 post valve closed
12/10/2010	5:02:55 PM	Main Vac valve closed
12/10/2010	5:02:55 PM	Bypass valve closed
12/10/2010	5:02:55 PM	Bubbler valve closed
12/10/2010	5:02:55 PM	Helium MFC set to  0.000000
12/10/2010	5:02:55 PM	H2 MFC set to  0.000000
12/10/2010	5:02:55 PM	BCl3 MFC set to  0.000000
12/10/2010	5:02:55 PM	PHl3 MFC set to  0.000000
12/10/2010	5:02:55 PM	SiCl4 MFC set to  0.000000
12/10/2010	5:02:55 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	5:02:55 PM	Tube furnace set to 0
12/10/2010	5:02:55 PM	Run finished at 5:02 PM
12/10/2010	5:10:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
12/10/2010	5:10:57 PM	Recipe started at 5:10 PM
12/10/2010	5:10:57 PM	Helium valve closed
12/10/2010	5:10:57 PM	H2 valve closed
12/10/2010	5:10:57 PM	BCl3 valve closed
12/10/2010	5:10:57 PM	PH3 valve closed
12/10/2010	5:10:57 PM	SiCl4 pre valve closed
12/10/2010	5:10:57 PM	SiCl4 post valve closed
12/10/2010	5:10:57 PM	Main Vac valve closed
12/10/2010	5:10:57 PM	Bubbler valve closed
12/10/2010	5:10:57 PM	Bypass valve opened
12/10/2010	5:10:57 PM	Helium MFC set to  0.000000
12/10/2010	5:10:57 PM	H2 MFC set to  0.000000
12/10/2010	5:10:57 PM	BCl3 MFC set to  0.000000
12/10/2010	5:10:57 PM	PHl3 MFC set to  0.000000
12/10/2010	5:10:57 PM	SiCl4 MFC set to  0.000000
12/10/2010	5:10:57 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	5:10:58 PM	Tube furnace set to 0
12/10/2010	5:12:03 PM	Helium valve closed
12/10/2010	5:12:03 PM	H2 valve closed
12/10/2010	5:12:03 PM	BCl3 valve closed
12/10/2010	5:12:03 PM	PH3 valve closed
12/10/2010	5:12:03 PM	SiCl4 pre valve closed
12/10/2010	5:12:03 PM	SiCl4 post valve closed
12/10/2010	5:12:03 PM	Bubbler valve closed
12/10/2010	5:12:03 PM	Main Vac valve opened
12/10/2010	5:12:03 PM	Bypass valve opened
12/10/2010	5:12:03 PM	Helium MFC set to  0.000000
12/10/2010	5:12:03 PM	H2 MFC set to  0.000000
12/10/2010	5:12:03 PM	BCl3 MFC set to  0.000000
12/10/2010	5:12:03 PM	PHl3 MFC set to  0.000000
12/10/2010	5:12:03 PM	SiCl4 MFC set to  0.000000
12/10/2010	5:12:03 PM	Bypass solenoid MFC set to  0.000000
12/10/2010	5:12:03 PM	Tube furnace set to 0
12/10/2010	5:12:03 PM	Run finished at 5:12 PM
12/10/2010	5:12:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
